×

CAPACITIVE ACCELEROMETER DEVICES AND WAFER LEVEL VACUUM ENCAPSULATION METHODS

  • US 20160370403A1
  • Filed: 06/22/2016
  • Published: 12/22/2016
  • Est. Priority Date: 06/22/2015
  • Status: Abandoned Application
First Claim
Patent Images

1. A device comprising:

  • a substrate;

    a microelectromechanical system (MEMS) comprising a plurality of integer N frames disposed within each other with the inner N−

    1 frames being suspended with respect to the substrate, the outermost frame attached to the substrate, and the innermost frame providing a proof mass;

    a plurality of N−

    1 sets of springs, each set of springs being of a predetermined design and attached from a first predetermined frame of the plurality of N frames to a second predetermined frame of the plurality of N frames;

    a plurality of M comb drive pairs, each comb drive pair comprising first and second comb drives attached at opposite sides of a third predetermined frame of the plurality of N frames to a fourth predetermined frame of the plurality of N frames.

View all claims
  • 0 Assignments
Timeline View
Assignment View
    ×
    ×