PRESSURE SENSOR DEVICE WITH A MEMS PIEZORESISTIVE ELEMENT ATTACHED TO AN IN-CIRCUIT CERAMIC BOARD
First Claim
1. A pressure sensor device comprising:
- a ceramic circuit board having a top side and a bottom side, the bottom side having a cavity, which extends through the ceramic circuit board to a ceramic diaphragm having a peripheral edge, the ceramic diaphragm having a thickness selected to enable the ceramic diaphragm to deflect responsive to an applied pressure;
a MEMS piezoresistive pressure sensing element attached to the top side and substantially centered over the ceramic diaphragm peripheral edge, the MEMS piezoresistive pressure sensing element configured to generate an output signal responsive to deflection of the ceramic diaphragm.
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Accused Products
Abstract
A pressure sensor device with a MEMS piezoresistive pressure sensing element attached to an in-circuit ceramic board comprises a monolithic ceramic circuit board formed by firing multiple layers of ceramic together. The bottom side of the circuit board has a cavity, which extends through layers of material from the ceramic circuit board is formed. A ceramic diaphragm, which is one of the layers, has a peripheral edge. The diaphragm'"'"'s thickness enables the diaphragm bounded by the edge to deflect responsive to applied pressure. A MEMS piezoresistive pressure sensing element attached to the top side of the ceramic circuit board generates an output signal responsive to deflection of the ceramic diaphragm. A conduit carrying a pressurized fluid (liquid or gas) can be attached directly to the ceramic circuit board using a seal on the bottom of the ceramic circuit board, which surrounds the opening of the cavity through the bottom.
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Citations
16 Claims
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1. A pressure sensor device comprising:
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a ceramic circuit board having a top side and a bottom side, the bottom side having a cavity, which extends through the ceramic circuit board to a ceramic diaphragm having a peripheral edge, the ceramic diaphragm having a thickness selected to enable the ceramic diaphragm to deflect responsive to an applied pressure; a MEMS piezoresistive pressure sensing element attached to the top side and substantially centered over the ceramic diaphragm peripheral edge, the MEMS piezoresistive pressure sensing element configured to generate an output signal responsive to deflection of the ceramic diaphragm. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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Specification