LIQUID COMPOSITION FOR FORMING SILICA POROUS FILM AND SILICA POROUS FILM FORMED FROM SUCH LIQUID COMPOSITION
First Claim
1. A liquid composition for forming a silica porous film which is prepared by mixing a hydrolyzate of tetramethoxysilane or tetraethoxysilane as a silicon alkoxide with a silica sol in which fumed silica particles having primary particles having a mean particle diameter of 40 nm or less and secondary particles having a mean particle diameter of 20 nm to 400 nm, that is greater than the mean particle diameter of the primary particles, are dispersed in a liquid medium,wherein a mass ratio (A/B) of a SiO2 content (B) of the silica sol to a SiO2 content (A) in the hydrolyzate is in a range of 1/99 to 60/40.
1 Assignment
0 Petitions
Accused Products
Abstract
A liquid composition for forming a silica porous film of the invention is prepared by mixing a hydrolyzate of tetramethoxysilane or tetraethoxysilane as a silicon alkoxide with a silica sol in which fumed silica particles having primary particles having a mean particle diameter of 40 nm or less and secondary particles having a mean particle diameter of 20 nm to 400 nm, that is greater than the mean particle diameter of the primary particles, are dispersed in a liquid medium, in which the mass ratio (AB) of the SiO2 content (B) of the silica sol to the SiO2 content (A) in the hydrolyzate is in a range of 1/99 to 60/40.
4 Citations
4 Claims
-
1. A liquid composition for forming a silica porous film which is prepared by mixing a hydrolyzate of tetramethoxysilane or tetraethoxysilane as a silicon alkoxide with a silica sol in which fumed silica particles having primary particles having a mean particle diameter of 40 nm or less and secondary particles having a mean particle diameter of 20 nm to 400 nm, that is greater than the mean particle diameter of the primary particles, are dispersed in a liquid medium,
wherein a mass ratio (A/B) of a SiO2 content (B) of the silica sol to a SiO2 content (A) in the hydrolyzate is in a range of 1/99 to 60/40.
- 2. A silica porous film forming method of forming a silica porous film using the liquid composition according to claim I.
-
3. A silica porous film comprising:
-
fumed silica particles having primary particles having a mean particle diameter of 40 nm or less and secondary particles having a mean particle diameter of 20 nm to 400 nm, that is greater than the mean particle diameter of the primary particles; and an amorphous SiO2 component existing between the fumed silica particles or between a coating film and a substrate, wherein a mean hole diameter of the film is in a range of 10 nm to 200 nm.
-
Specification