INTEGRATED MICROELECTROMECHANICAL GYROSCOPE WITH IMPROVED DRIVING STRUCTURE
First Claim
1. A MEMS gyroscope, comprising:
- a first mass configured to move in a first direction along a first axis;
a second mass configured to move in a second direction along a second axis, the second axis being transverse to the first axis; and
a first elastic coupling element coupled to the first mass and the second mass, the first elastic coupling element being configured to move the second mass in the second direction in response to the first mass in the first direction.
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Abstract
An integrated MEMS gyroscope, is provided with: at least a first driving mass driven with a first driving movement along a first axis upon biasing of an assembly of driving electrodes, the first driving movement generating at least one sensing movement, in the presence of rotations of the integrated MEMS gyroscope; and at least a second driving mass driven with a second driving movement along a second axis, transverse to the first axis, the second driving movement generating at least a respective sensing movement, in the presence of rotations of the integrated MEMS gyroscope. The integrated MEMS gyroscope is moreover provided with a first elastic coupling element, which elastically couples the first driving mass and the second driving mass in such a way as to couple the first driving movement to the second driving movement with a given ratio of movement.
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Citations
11 Claims
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1. A MEMS gyroscope, comprising:
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a first mass configured to move in a first direction along a first axis; a second mass configured to move in a second direction along a second axis, the second axis being transverse to the first axis; and a first elastic coupling element coupled to the first mass and the second mass, the first elastic coupling element being configured to move the second mass in the second direction in response to the first mass in the first direction. - View Dependent Claims (2, 3, 4)
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5. A device, comprising:
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a substrate; a driving assembly coupled to the substrate, the driving assembly having a first set of driving electrodes separated from a second set of driving electrodes; a first pair of masses coupled to the driving assembly and positioned between the first set of driving electrodes and the second set of driving electrodes, the first pair of masses configured to be driven along a first axis in response to the driving assembly; a second pair of masses configured to move along a second axis that is transverse to the first axis; a first elastic coupling element coupled to a first one of the first pair of masses and a first one of the second pair of masses; a second elastic coupling element coupled to the first one of the first pair of masses and a second one of the second pair of masses; a third elastic coupling element coupled to a second one of the first pair of masses and the first one of the second pair of masses; and a fourth elastic coupling element coupled to the second one of the first pair of masses and the second one of the second pair of masses, the first, second, third, and fourth elastic coupling elements configured to move the second pair of masses in response to movement of the first pair of masses. - View Dependent Claims (6, 7, 8, 9)
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10. A MEMS gyroscope, comprising:
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a driving assembly having a first set of driving electrodes on a first side of the driving assembly and a second set of driving electrode on a second side of the driving assembly; a first mass configured to be driven to have a first driving movement along a first axis in response to biasing of the driving assembly; a second mass configured to be driven to have a second driving movement along a second axis in response to the first mass, the second axis being transverse to the first axis, the second driving movement being configured to generate a first sensing movement, in response to the rotations of the MEMS gyroscope; and a first elastic coupling element configured to elastically couple the first mass and the second mass and to couple the first driving movement to the second driving movement with a ratio of movement.
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11. A device, comprising:
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a first mass; a second mass; and a first elastic coupling element coupled to the first mass and the second mass, the first elastic coupling element being configured to move the second mass in response to movement of the first mass.
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Specification