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INTEGRATED MICROELECTROMECHANICAL GYROSCOPE WITH IMPROVED DRIVING STRUCTURE

  • US 20170023363A1
  • Filed: 12/19/2014
  • Published: 01/26/2017
  • Est. Priority Date: 12/24/2009
  • Status: Active Grant
First Claim
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1. A MEMS gyroscope, comprising:

  • a first mass configured to move in a first direction along a first axis;

    a second mass configured to move in a second direction along a second axis, the second axis being transverse to the first axis; and

    a first elastic coupling element coupled to the first mass and the second mass, the first elastic coupling element being configured to move the second mass in the second direction in response to the first mass in the first direction.

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