WAVEGUIDE SHEET, FABRICATION METHOD THEREOF AND SPECTROMETER USING THE SAME
First Claim
1. A fabrication method of a waveguide sheet for a spectrometer, comprising:
- providing a pattern to be performed by a microelectromechanical (MEM) process, wherein the pattern comprises a shape of a first waveguide sheet; and
forming at least one waveguide sheet based on the provided pattern by the MEM process,wherein the waveguide sheet comprises at least one positioning side and at least one stray light elimination side formed by the MEM process, the positioning side is for a spectral component of the spectrometer to abut against so that the spectral component is positioned at the positioning side, and the stray light elimination side is to be used as a side of a stray light outlet.
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Accused Products
Abstract
An fabrication method of a waveguide sheet for a spectrometer includes the steps of: providing a pattern to be performed by a microelectromechanical (MEM) process; and forming at least one waveguide sheet based on the provided pattern by the MEM process. The pattern includes a shape of a first waveguide sheet. The waveguide sheet includes at least one positioning side and at least one stray light elimination side formed by the MEM process. The positioning side is for a spectral component of the spectrometer to abut against so that the spectral component is positioned at the positioning side, and the stray light elimination side is to be used as a side of a stray light outlet. The structure of the waveguide sheet and the configuration of the spectrometer are also provided.
4 Citations
28 Claims
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1. A fabrication method of a waveguide sheet for a spectrometer, comprising:
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providing a pattern to be performed by a microelectromechanical (MEM) process, wherein the pattern comprises a shape of a first waveguide sheet; and forming at least one waveguide sheet based on the provided pattern by the MEM process, wherein the waveguide sheet comprises at least one positioning side and at least one stray light elimination side formed by the MEM process, the positioning side is for a spectral component of the spectrometer to abut against so that the spectral component is positioned at the positioning side, and the stray light elimination side is to be used as a side of a stray light outlet. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A waveguide sheet for a spectrometer, comprising
a first surface comprising a reflective layer; -
a first positioning side connected to the first surface, wherein the first positioning side is fabricated by a microelectromechanical (MEM) process and has a first surface feature formed by the MEM process, and the first positioning side is for a first spectral component of the spectrometer to abut against so that the first spectral component is positioned at the first positioning side; and a first stray light elimination side connected to the first surface, wherein the first stray light elimination side is fabricated by the MEM process and has a second surface feature formed by the MEM process, and the first stray light elimination side is to be used as a side of a first stray light outlet, wherein the waveguide sheet is comprised of a MEM material. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21)
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22. A spectrometer, comprising:
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a first waveguide sheet comprising at least one first positioning side and at least one first stray light elimination side formed by a first microelectromechanical (MEM) process, wherein the first stray light elimination side is to be used as a side of a stray light outlet; a first spectral component abutting against the first positioning side; and a second waveguide sheet disposed under the first waveguide sheet, wherein a gap is formed between the first waveguide sheet and the second waveguide sheet. - View Dependent Claims (23, 24, 25, 26, 27, 28)
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Specification