SEMICONDUCTOR DEVICE, INFRARED IMAGING DEVICE EQUIPPED WITH THE SEMICONDUCTOR DEVICE, AND METHOD FOR CONTROLLING SEMICONDUCTOR DEVICE

• US 20170023413A1
• Filed: 04/15/2015
• Published: 01/26/2017
• Est. Priority Date: 04/22/2014
• Status: Abandoned Application

• Current Assignee: NEC Corporation
• Original Assignee: NEC Corporation
• Inventors: OKUYAMA, Kuniyuki
• Application Number:
  US15/301,757
• Publication Number:
  US 20170023413A1
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: G01J 1/42 using electric radiation detectors optical or mechanical part G01J1/04; by comparison with a reference light or electric value G01J1/10
• CPC Class Codes: G01J 1/44 Electric circuits for command of an exposure part G03B7/02
• CPC Class Codes: G01J 2005/0077 Imaging
• CPC Class Codes: G01J 5/20 using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
• CPC Class Codes: G01J 5/22 Electrical features thereof
• CPC Class Codes: G01J 5/24 Use of specially adapted circuits, e.g. bridge circuits
• CPC Class Codes: G01J 5/34 using capacitors, e.g. pyroelectric capacitors
• CPC Class Codes: H04N 5/33 Transforming infrared radiation cameras or camera modules for generating image signals from infrared radiation H04N23/20; circuitry of SSIS for transforming infrared radiation into image signals H04N25/20

Abstract

The purpose of the present invention is to shorten the time needed for the terminal voltage of a bolometer element to converge to bias voltage, shorten the reset interval of an integration circuit, and improve the temperature resolution. This semiconductor device is provided with a means for presenting a bias voltage to a bolometer element. A bias circuit that inputs to an integration circuit the differential current of the current flowing to the bolometer element when the bias voltage is presented to the bolometer element, and the current from a bias cancel circuit that eliminates offset current of the bolometer element, pre-charges the bolometer element at a prescribed pre-charge voltage.

Claims

1. A semiconductor device comprising:

at least one bolometer element; and

a bias circuit including a bias voltage applying unit which applies bias voltage to the bolometer element, and inputting difference current between current flowing through the bolometer element when the bias voltage is applied with the bolometer element, and current from a bias-cancelling circuit eliminating offset current of the bolometer element, to an integration circuit, wherein

the bias circuit further includes a pre-charge unit which pre-charges the bolometer element with predetermined pre-charge voltage.

2. The semiconductor device according to claim 1, wherein

the pre-charge unit pre-charges the bolometer element with the pre-charge voltage in a partial period or an entire period of a period in which the bolometer element is not biased by the bias voltage.

3. The semiconductor device according to claim 1, wherein

the pre-charge unit pre-charges the bolometer element with the pre-charge voltage in at least a partial period of a period in which the bolometer element is not biased by the bias voltage, including a period immediately before the bolometer element is biased by the bias voltage.

4. The semiconductor device according to claim 1, wherein

the bias circuit includes first and second switches, being alternately turned on for every predetermined period and supplying the bias voltage when being in an on-state, as the bias voltage applying unit, and

the pre-charge unit,

in a period in which the first switch is turned on and the bias voltage is applied with one end of a first bolometer element connected to the first switch,

applies the pre-charge voltage to one end of a second bolometer element connected to the second switch in an off-state, and,

in a period in which the second switch is turned on and the bias voltage is applied with one end of the second bolometer element connected to the second switch,

applies the pre-charge voltage to one end of the first bolometer element connected to the first switch in an off-state.

5. The semiconductor device according to claim 1, wherein

the bias circuit includes first to m-th switches (m is a predetermined integer greater than or equal to 2) set to an on-state cyclically, successively, and one by one, as the bias voltage applying unit, and

the pre-charge unit,

in a period in which an i-th switch (i is an integer where 1≦

i≦

m) is turned on, and the bias voltage is applied with one end of a bolometer element connected to the i-th switch (1≦

i≦

m),

applies the pre-charge voltage to one end of a bolometer element connected to an (i+1)-th switch (when i is equal to m, [m+1]-th is read as first) in an off-state.

6. The semiconductor device according to claim 1, wherein,

when the pre-charge unit applies pre-charge voltage with one end of the bolometer element, the other end of the bolometer element is set to an open state.

7. The semiconductor device according to claim 1, wherein the pre-charge voltage is equal to the bias voltage or voltage obtained by adding or subtracting predetermined voltage to or from the bias voltage.

8. The semiconductor device according to claim 1, wherein

the integration circuit is reset for a predetermined period from a start of a period in which the bias voltage is applied with the bolometer element, and, after the reset is completed, the integration circuit integrates difference current between current from the bias-cancelling circuit and current flowing through the bolometer element when the bias voltage is applied with the bolometer element.

9. The semiconductor device according to claim 1, further comprising:

one or more read circuits each including the bias circuit, the bias-cancelling circuit, and the integration circuit;

as the bolometer elements,

first to m-th bolometer elements (m is an integer greater than or equal to

     2) with respect to one of the read circuits for each line; and

with respect to one of the read circuits,

an array of m×

n bolometer elements including n of the lines (n is a predetermined integer greater than or equal to

     1).

10. The semiconductor device according to claim 9, further comprising,

for each of the n lines, first to m-th pixel switches between the first to m-th bolometer elements corresponding to one of the read circuits, and a reference potential, wherein

the pixel switches on each line of the n lines are turned on and off, in common, by each scanning signal of n scanning signals.

11. The semiconductor device according to claim 9, further comprising,

for each of the n lines, first to m-th pixel switches between the first to m-th bolometer elements corresponding to one of the read circuits, and a reference potential, wherein,

with respect to one of the read circuits,

first to m-th pixel switches on one line are respectively connected to first to m-th scanning signals, and

with respect to the n lines, m×

n scanning signals are provided.

12. The semiconductor device according to claim 5, wherein

the first to m-th switches are composed of horizontal switches set to on for each phase.

13. An infrared imaging device comprising the semiconductor device according to claim 1.

14. A method for controlling a semiconductor device, comprising:

inputting difference current between current flowing through a bolometer element when bias voltage is applied with the bolometer element from a bias circuit, and current from a bias-cancelling circuit eliminating offset current of the bolometer element, to an integration circuit, and outputting an integrated value of the difference current; and

pre-charging the bolometer element with predetermined pre-charge voltage.

15. The method for controlling a semiconductor device,

according to claim 14, further comprising pre-charging the bolometer element with the pre-charge voltage in a partial period or an entire period of a period in which the bolometer element is not biased by the bias voltage.

16. The method for controlling a semiconductor device, according to claim 14, further comprising

pre-charging the bolometer element with the pre-charge voltage in at least a partial period of a period in which the bolometer element is not biased by the bias voltage, including a period immediately before the bolometer element is biased by the bias voltage.

17. The method for controlling a semiconductor device, according to claim 14, further comprising:

in a period in which a first switch is turned on, and the bias voltage is applied with one end of a first bolometer element connected to the first switch,

applying the pre-charge voltage with one end of a second bolometer element connected to a second switch in an off-state; and

in a period in which the second switch is turned on, and the bias voltage is applied with one end of the second bolometer element connected to the second switch,

applying the pre-charge voltage with one end of the first bolometer element connected to the first switch in an off-state.

18. The method for controlling a semiconductor device, according to claim 14, further comprising,

in a period in which an i-th switch (1≦

i≦

m), out of first to m-th switches (m is a predetermined integer greater than or equal to

     2) set to an on-state successively, cyclically, and one by one, is turned on, and the bias voltage is applied with one end of a bolometer element connected to the i-th switch (1≦

i≦

m),

applying the pre-charge voltage with one end of a bolometer element connected to an (i+1)-th switch (when i is equal to m, [m+1]-th is read as first) in an off-state.

19. The method for controlling a semiconductor device, according to claim 14, further comprising,

when pre-charge voltage is applied with one end of the bolometer element, setting the other end of the bolometer element to an open state.

20. The method for controlling a semiconductor device, according to claim 14, wherein

the pre-charge voltage is equal to the bias voltage or voltage obtained by adding predetermined voltage to the bias voltage.

21. The method for controlling a semiconductor device, according to claim 14, further comprising

resetting the integration circuit for a predetermined period from a start of a period in which the bias voltage is applied with the bolometer element, wherein,

after the reset is completed, the integration circuit integrates difference current between current from the bias-cancelling circuit, and current flowing through the bolometer element when the bias voltage is applied with the bolometer element.