MEMS DEVICE WITH FLEXIBLE TRAVEL STOPS AND METHOD OF FABRICATION
First Claim
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1. A microelectromechanical systems (MEMS) device comprising:
- a substrate;
a proof mass positioned in space above a surface of the substrate, wherein the proof mass is configured to move relative to the substrate;
a flexible travel stop structure formed within the proof mass, whereinthe flexible travel stop structure comprises a contact lever connected to the proof mass via flexible elements; and
a bumper formed on the surface of the substrate, whereinthe contact lever is aligned to make contact with the bumper when the proof mass moves toward the substrate.
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Abstract
A microelectromechanical systems (MEMS) device is provided, which includes a substrate; a proof mass positioned in space above a surface of the substrate, where the proof mass is configured to move relative to the substrate; a flexible travel stop structure formed within the proof mass, where the flexible travel stop structure includes a contact lever connected to the proof mass via flexible elements; and a bumper formed on the surface of the substrate, where the contact lever is aligned to make contact with the bumper when the proof mass moves toward the substrate.
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Citations
20 Claims
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1. A microelectromechanical systems (MEMS) device comprising:
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a substrate; a proof mass positioned in space above a surface of the substrate, wherein the proof mass is configured to move relative to the substrate; a flexible travel stop structure formed within the proof mass, wherein the flexible travel stop structure comprises a contact lever connected to the proof mass via flexible elements; and a bumper formed on the surface of the substrate, wherein the contact lever is aligned to make contact with the bumper when the proof mass moves toward the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A microelectromechanical systems (MEMS) device comprising:
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a substrate; a proof mass positioned in space above a surface of the substrate, wherein the proof mass is configured to move relative to the substrate; a flexible travel stop structure formed within the proof mass, wherein the flexible travel stop structure comprises a contact lever connected to the proof mass via flexible elements; and a cap structure attached to the surface of the substrate that extends above the proof mass, wherein the cap structure comprises an extension aligned with the contact lever, and the contact lever is aligned to make contact with the extension when the proof mass moves away from the substrate. - View Dependent Claims (12, 13, 14, 15, 16, 17)
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18. A method of fabricating a microelectromechanical systems (MEMS) device comprising:
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forming at least one bumper on a substrate; depositing at least one sacrificial layer over the at least one bumper; etching at least one opening for an anchor into the at least one sacrificial layer; depositing a structural layer over the at least one sacrificial layer and within the at least one opening; etching the structural layer to form a proof mass and a flexible travel stop structure within the proof mass, wherein the etching comprises; etching a first opening and a second opening to form a contact lever and torsion springs connecting the contact lever to the proof mass, wherein the contact lever is aligned with the at least one bumper; and removing the sacrificial layer to release the proof mass, wherein the proof mass is configured to move relative to a surface of the substrate. - View Dependent Claims (19, 20)
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Specification