PIXEL STRUCTURE AND METHOD OF MANUFACTURING A PIXEL STRUCTURE

• US 20170025445A1
• Filed: 10/04/2016
• Published: 01/26/2017
• Est. Priority Date: 07/13/2012
• Status: Active Grant

• Current Assignee: AU Optronics Corporation
• Original Assignee: AU Optronics Corporation
• Inventors: Chang, Wei-Jen, Lo, Wan-Yu, Chen, Po-Hsueh
• Granted Patent: US 9,905,578 B2
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: H01L 27/1225 with semiconductor materials not belonging to the group IV of the periodic table, e.g. InGaZnO
• CPC Class Codes: H01L 27/1248 with a particular composition or shape of the interlayer dielectric specially adapted to the circuit arrangement
• CPC Class Codes: H01L 27/1255 integrated with passive devices, e.g. auxiliary capacitors
• CPC Class Codes: H01L 27/1259 Multistep manufacturing methods
• CPC Class Codes: H01L 29/22 including, apart from doping materials or other impurities, only AIIBVI compounds
• CPC Class Codes: H01L 29/24 including, apart from doping materials or other impurities, only semiconductor materials not provided for in groups H01L29/16, H01L29/18, H01L29/20, H01L29/22 including organic materials H10K99/00
• CPC Class Codes: H01L 29/42356 Disposition, e.g. buried gate electrode H01L29/42324 and H01L29/4234 take precedence
• CPC Class Codes: H01L 29/66742 Thin film unipolar transistors
• CPC Class Codes: H01L 29/66969 of devices having semiconductor bodies not comprising group 14 or group 13/15 materials comprising selenium or tellurium in uncombined form other than as impurities in semiconductor bodies of other materials, comprising cuprous oxide or cuprous iodide H01L21/02365
• CPC Class Codes: H01L 29/7869 having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate

Abstract

A pixel structure and a method of manufacturing a pixel structure are provided. The pixel structure includes an active device, a gate insulation layer, a dielectric insulation layer, a capacitance electrode, a protection layer and a pixel electrode. The active device includes a gate, a semiconductor channel layer, a source and a drain. The dielectric insulation layer covers the semiconductor channel layer. A dielectric index of the dielectric insulation layer is greater than a dielectric index of the gate insulation layer. The capacitance electrode is overlapped with the drain. The capacitance electrode, the drain and the dielectric insulation layer between the two constitute a storage capacitor structure. The protection layer is disposed on the dielectric insulation layer and the capacitance electrode is located between the protection layer and the dielectric insulation layer. The pixel electrode is disposed on the protection layer and connected to the drain of the active device.

Claims

1. A method of manufacturing a pixel structure comprising:

forming a gate on a substrate;

forming a gate insulation layer on the substrate to cover the gate;

forming a source and a drain on the gate insulation layer, wherein the source and the drain both above the gate are separated by a gap such that the gate has at least a portion that is not overlapped with the source and the drain;

forming a semiconductor channel layer above the source and the drain, wherein the semiconductor channel layer is at least disposed in the gap;

forming a dielectric insulation layer on the substrate to cover the source, the drain and the semiconductor channel layer, wherein a dielectric index of the dielectric insulation layer is greater than a dielectric index of the gate insulation layer;

forming a capacitance electrode on the dielectric insulation layer, wherein the capacitance electrode is overlapped with the drain such that the capacitance electrode, the drain and the dielectric insulation layer sandwiched between the capacitance electrode and the drain constitute a storage capacitor structure, wherein the capacitance electrode is not overlapping with the gate and the source;

forming a protection layer on the dielectric insulation layer to cover the capacitance electrode; and

forming a pixel electrode on the protection layer and connected to the drain.

2. The method as recited in claim 1, wherein the step of forming the source and the drain, the step of forming the dielectric insulation layer and the step of forming the capacitance electrode are processed in sequence.

3. The method as recited in claim 1, wherein a material of the dielectric insulation layer comprises aluminum oxide or titanium dioxide.

4. The method as recited in claim 1, wherein the dielectric index of the dielectric insulation layer ranges from 5 to 10.

5. The method as recited in claim 1, wherein the step of forming the semiconductor channel layer is processed after forming the source and the drain.

6. The method as recited in claim 1 further comprising forming a first contact opening in the dielectric insulation layer to expose the drain, and forming a second contact opening in the protection layer to be communicated with the first contact opening such that the pixel electrode manufactured subsequently is connected to the drain via the first contact opening and the second contact opening communicated with each other.

7. The method as recited in claim 1, wherein a material of the semiconductor channel layer comprises an oxide semiconductor material.

8. The method as recited in claim 7, further comprising a step of forming a channel protection layer on a top surface of the semiconductor channel layer.

9. The method as recited in claim 8, wherein the step of forming the channel protection layer comprises performing a nitridation process to the semiconductor channel layer in a chamber for depositing the oxide semiconductor material as the semiconductor channel layer.

10. The method as recited in claim 7, wherein the oxide semiconductor material comprises Indium-Gallium-Zinc Oxide (IGZO), Zinc Oxide (ZnO), Stannic Oxide (SnO), Indium-Zinc Oxide (IZO), Gallium-Zinc Oxide (GZO), Zinc-Tin Oxide (ZTO) or Indium-Tin Oxide (ITO).

11. The method as recited in claim 9, wherein a material of the channel protection layer comprises Indium-Gallium-Zinc Oxynitride (IGZON), Zinc Oxynitride (ZnON), Stannic Oxynitride (SnON), Indium-Zinc Oxynitride (IZON), Gallium-Zinc Oxynitride (GZON), Zinc-Tin Oxynitride (ZTON) or Indium-Tin Oxide Nitride (ITON).