GAS DETECTOR WITH A THERMALLY UNIFORM MEMS DIE
First Claim
Patent Images
1. A microelectromechanical systems die comprising:
- a thermally conductive substrate;
at least one insulator film disposed on the thermally conductive substrate;
a sensor material disposed on the at least one insulator film; and
a heater circumferentially disposed around the sensor material.
1 Assignment
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Accused Products
Abstract
A microelectromechanical systems die including a thermally conductive substrate, at least one insulator film disposed on the thermally conductive substrate, a sensor material disposed on the at least one insulator film, and a heater circumferentially disposed around the sensor material.
7 Citations
31 Claims
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1. A microelectromechanical systems die comprising:
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a thermally conductive substrate; at least one insulator film disposed on the thermally conductive substrate; a sensor material disposed on the at least one insulator film; and a heater circumferentially disposed around the sensor material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A gas detector package comprising:
a microelectromechanical systems die comprising; a thermally conductive substrate; at least one insulator film disposed on the thermally conductive substrate; a sensor material disposed on the at least one insulator film; and a heater circumferentially disposed around the a sensor material. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31)
Specification