REDUCING RESONANCE PEAKS AND DRIVE TONES FROM A MICRO-ELECTRO-MECHANICAL SYSTEM GYROSCOPE RESPONSE
First Claim
1. A micro-electro-mechanical system (MEMS) gyroscope, comprising:
- a drive oscillation component configured to vibrate a sensor mass at a drive resonance frequency;
a sense circuit configured to;
detect a deflection of the sensor mass; and
generate, based on the deflection and the drive resonance frequency, a demodulated output; and
a signal processing component configured to;
receive a set of frequencies comprising a first value representing the drive resonance frequency and a second value corresponding to a sense resonance frequency associated with the sense circuit; and
apply, based on the first value and the second value, a notch filter to the demodulated output to obtain a filtered output.
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Accused Products
Abstract
Reducing noise from drive tone and sense resonance peaks of a micro-electro-mechanical system (MEMS) gyroscope output using a notch filter is presented herein. The MEMS gyroscope can include a drive oscillation component configured to vibrate a sensor mass at a drive resonance frequency; a sense circuit configured to detect a deflection of the sensor mass, and generate, based on the deflection and the drive resonance frequency, a demodulated output; and a signal processing component configured to receive a set of frequencies comprising a first value representing the drive resonance frequency and a second value corresponding to a sense resonance frequency associated with the sense circuit, and apply, based on the first value and the second value, a notch filter to the demodulated output to obtain a filtered output.
17 Citations
22 Claims
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1. A micro-electro-mechanical system (MEMS) gyroscope, comprising:
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a drive oscillation component configured to vibrate a sensor mass at a drive resonance frequency; a sense circuit configured to; detect a deflection of the sensor mass; and generate, based on the deflection and the drive resonance frequency, a demodulated output; and a signal processing component configured to; receive a set of frequencies comprising a first value representing the drive resonance frequency and a second value corresponding to a sense resonance frequency associated with the sense circuit; and apply, based on the first value and the second value, a notch filter to the demodulated output to obtain a filtered output. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method, comprising:
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vibrating, by a drive oscillation component of a micro-electro-mechanical system (MEMS) gyroscope, a sensor mass of the MEMS gyroscope at a drive resonance frequency; detecting, by a sense circuit of the MEMS gyroscope, a deflection of the sensor mass; generating, by the sense circuit based on the deflection and the drive resonance frequency, a demodulated output; receiving, by a signal processing component of the MEMS gyroscope, a set of frequencies from a memory, wherein the set of frequencies comprises a first value representing the drive resonance frequency and a second value corresponding to a sense resonance frequency associated with the sense circuit; and applying, by the signal processing component based on the first value and the second value, a notch filter to the demodulated output to obtain a filtered output. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18)
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19. A system, comprising:
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a frequency identification component configured to; determine a drive resonance frequency corresponding to a vibration of a sensor mass of a MEMS gyroscope; and determine a sense resonance frequency of a sense circuit of the MEMS gyroscope; and a programming component configured to; store the drive resonance frequency and a value corresponding to the sense resonance frequency in a memory to facilitate an application, by the MEMS gyroscope using the drive resonance frequency and the value, of a notch filter to a demodulated output corresponding to a coriolis force associated with a deflection of the sensor mass of the MEMS gyroscope. - View Dependent Claims (20, 21, 22)
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Specification