MICROFILTRATION DEVICE

• US 20170030890A1
• Filed: 07/27/2016
• Published: 02/02/2017
• Est. Priority Date: 07/31/2015
• Status: Abandoned Application

• Current Assignee: Infineon Technologies AG
• Original Assignee: Infineon Technologies AG
• Inventors: Figueira Da Silva, Sylvicley, Oswatitsch, Alexander, Holweg, Gerald, Arnanthigo, Yonsuang, Berger, Jan, Denifl, Guenter, Moder, Iris, Ostermann, Thomas, Rajaraman, Vijaye Kumar, Stranzl, Gudrun
• Application Number:
  US15/221,010
• Publication Number:
  US 20170030890A1
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: B01D 2313/345 Electrodes
• CPC Class Codes: B01D 2325/0283 Pore size
• CPC Class Codes: B01D 2325/26 Electrical properties
• CPC Class Codes: B01D 61/147 Microfiltration
• CPC Class Codes: B01D 61/18 Apparatus therefor
• CPC Class Codes: B01D 63/087 Single membrane modules
• CPC Class Codes: B01D 69/02 characterised by their properties
• CPC Class Codes: B01D 71/0215 Silicon carbide; Silicon nitride; Silicon oxycarbide
• CPC Class Codes: B01D 71/02231 Palladium
• CPC Class Codes: B01D 71/02232 Nickel
• CPC Class Codes: B01D 71/027 Silicium oxide
• CPC Class Codes: G01N 33/491 by separating the blood components G01N15/05 takes precedence

Abstract

A microfiltration device comprises a substrate having a first surface and a second surface opposite to the first surface. The substrate includes a cavity between the first surface and the second surface. The substrate further includes a microfilter including a frame part in contact with the substrate and a filter part abutting the cavity. The microfilter comprises in both the frame part and the filter part a semiconducting or conducting material.

Claims

1. A microfiltration device, comprising

a substrate having a first surface and a second surface opposite to the first surface, the substrate including a cavity between the first surface and the second surface, and

a microfilter including a frame part in contact with the substrate and a filter part abutting the cavity, the microfilter comprising in both the frame part and the filter part a semiconducting or conducting material.

2. The microfiltration device of claim 1, wherein the microfilter comprises a first layer of the semiconducting or conducting material.

3. The microfiltration device of claim 2, wherein the microfilter further comprises a second layer of an insulating material.

4. The microfiltration device of claim 3, wherein the first layer of the semiconducting or conducting material is a patterned layer on the second layer of the insulating material.

5. The microfiltration device of claim 3, wherein the microfilter further comprises a third layer of an insulating material, the first layer being sandwiched between the second and the third layer.

6. The microfiltration device of claim 1, wherein the substrate includes an insulating material.

7. The microfiltration device of claim 1, wherein the microfilter and the substrate comprise a same material.

8. The microfiltration device of claim 1, wherein the microfilter is bonded on the substrate.

9. The microfiltration device of claim 1, wherein the semiconducting or conducting material comprises at least one of polysilicon, silicon, porous silicon, and a metal.

10. The microfiltration device of claim 1, wherein the insulating material comprises at least one of an oxide, a nitride, a carbide, and a glass.

11. The microfiltration device of claim 1, wherein the filter part comprises pores arranged in a regular pattern.

12. The microfiltration device of claim 1, wherein the filter part comprises pores of a uniform pore size, the uniform pore size being a size in a range of 1 μ

m to 10 μ

m.

13. The microfiltration device of claim 1, further comprising a contact area in the frame part, the contact area being electrically connected to the semiconducting or conducting material in the filter part.

14. A sensor device, comprising:

a microfiltration device, comprising

a substrate having a first surface and a second surface opposite to the first surface, the substrate including a cavity between the first surface and the second surface, and

a microfilter including a frame part in contact with the substrate and a filter part abutting the cavity, the microfilter comprising in both the frame part and the filter part a semiconducting or conducting material; and

a sensor located at a filtrate side of the filter part, the sensor being adapted to measure a characteristic of a filtrate.

15. The sensor device of claim 14, wherein the sensor comprises an optical sensor.

16. The sensor device of claim 14, wherein the sensor comprises a sensor electrode.

17. The sensor device of claim 16, wherein the filter part constitutes the sensor electrode of the sensor.

18. The sensor device of claim 14, wherein the sensor comprises an application-specific integrated circuit.

19. The sensor device of claim 14, wherein the sensor is arranged on a sensor substrate, the sensor substrate being bonded to the microfiltration device such that the sensor faces the filter part.

20. A multisensor device, comprising at least two sensor devices of claim 14 arranged next to each other in a lateral direction, or comprising at least two sensor devices of claim 14 stacked on each other in a vertical direction.