MICROMECHANICAL STRUCTURE FOR AN ACCELERATION SENSOR
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Abstract
A micromechanical structure for an acceleration sensor, including a seismic mass that is constituted definedly asymmetrically with reference to the rotational Z axis of the structure of the acceleration sensor, spring elements that are fastened on the seismic mass and on at least one fastening element, a rotational motion of the seismic mass being generatable by way of the spring elements substantially only upon an acceleration in a defined sensing direction within a plane constituted substantially orthogonally to the rotational Z axis.
11 Citations
26 Claims
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1-13. -13. (canceled)
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14. A micromechanical structure for an acceleration sensor, comprising:
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a seismic mass that is constituted definedly asymmetrically with reference to the rotational Z axis of the structure of the acceleration sensor; and spring elements that are fastened on the seismic mass and on at least one fastening element; wherein a rotational motion of the seismic mass is generatable by the spring elements substantially only upon an acceleration in a defined sensing direction within a plane constituted substantially orthogonally to the rotational Z axis. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. An acceleration sensor, comprising:
a micromechanical structure, including; a seismic mass that is constituted definedly asymmetrically with reference to the rotational Z axis of the structure of the acceleration sensor; and spring elements that are fastened on the seismic mass and on at least one fastening element; wherein a rotational motion of the seismic mass is generatable by the spring elements substantially only upon an acceleration in a defined sensing direction within a plane constituted substantially orthogonally to the rotational Z axis.
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26. A method for manufacturing a micromechanical structure for an acceleration sensor, the method comprising:
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providing a seismic mass having a defined asymmetry with respect to a rotational Z axis of the structure; and providing spring elements so that the spring elements are fastened on the seismic mass and on at least one fastening element, so that a motion of the seismic mass isg generatable by the spring elements substantially only upon an acceleration in a defined sensing direction within a plane constituted orthogonally to the rotational Z axis.
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Specification