WARPED WAFERS VACUUM CHUCK

• US 20170053822A1
• Filed: 08/07/2016
• Published: 02/23/2017
• Est. Priority Date: 08/23/2015
• Status: Active Application

• Current Assignee: Camtek Limited (Hexagon AB)
• Original Assignee: Camtek Limited (Hexagon AB)
• Inventors: Ben Natan, Arnon, Chen, Elik
• Application Number:
  US15/230,428
• Publication Number:
  US 20170053822A1
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: H01L 21/6838 with gripping and holding devices using a vacuum; Bernoulli devices

Abstract

A chuck that comprises a vacuum system, an upper surface, a groove and a flexible sealing element, wherein at least a bottom portion of the flexible sealing element is positioned within the groove, wherein each one of the groove and the flexible sealing element surrounds a region of the upper surface, wherein the vacuum system is configured to supply vacuum to the region of the upper surface and wherein the flexible sealing element is configured to move between a top position in which an upper portion of the flexible sealing element extends above the upper surface and between a bottom position in which the upper portion of the flexible sealing element does not extend above the upper surface.

Claims

1. A chuck that comprises a vacuum system, an upper surface, a groove and a flexible sealing element;

wherein at least a bottom portion of the flexible sealing element is positioned within the groove;

wherein each one of the groove and the flexible sealing element surrounds a region of the upper surface;

wherein the vacuum system is configured to supply vacuum to the region of the upper surface; and

wherein the flexible sealing element is configured to move between a top position in which an upper portion of the flexible sealing element extends above the upper surface and between a bottom position in which the upper portion of the flexible sealing element does not extend above the upper surface.

2. The chuck according to claim 1, wherein when (a) a substrate is positioned on the flexible sealing element, (b) vacuum is applied to the region of the upper surface by the vacuum system, and (c) the flexible sealing element extends above the upper surface then a lower surface of the substrate, the flexible sealing element and the upper surface form a sealed environment.

3. The chuck according to claim 1, wherein the flexible sealing element is configured to be lowered, at a first point in time, to an initial position that is below the top position, when a substrate is positioned on the flexible sealing element;

wherein when positioned in the initial position the flexible sealing element is positioned above the upper surface.

4. The chuck according to claim 3, wherein the flexible sealing element is configured to be lowered, at a second point in time that follows the first point in time, to another position that is below the initial position, in response to vacuum applied to the region by the vacuum system.

5. The chuck according to claim 3, wherein when positioned in the other position the flexible sealing element does not extend above the upper surface;

and wherein a lower surface of the substrate and the upper surface form a sealed environment.

6. The chuck according to claim 1, wherein the flexible sealing element is a flexible sealing ring.

7. The chuck according to claim 1, wherein the flexible sealing element is not radially symmetrical about a center of the upper surface.

8. The chuck according to claim 1, wherein the flexible sealing element is not radially symmetrical about a center of the upper surface.

9. The chuck according to claim 1, wherein the bottom portion of the flexible sealing element is a wedge that is positioned within the groove.

10. The chuck according to claim 1, wherein the bottom portion of the flexible sealing element is thicker by a factor of at least two from the upper portion of flexible sealing element.

11. The chuck according to claim 1, wherein a width of the groove does not exceed 10 millimeters.

12. The chuck according to claim 1, wherein a width of the groove is about 6.8 millimeters.

13. The chuck according to claim 1, wherein the upper portion of the flexible sealing element comprises a sequence of segments, wherein the segments are oriented to each other when the flexible sealing element is positioned in at least one position.

14. The chuck according to claim 1, wherein the upper portion of the flexible sealing element comprises multiple segments that are coupled to each other, wherein at least one segment is linear.

15. The chuck according to claim 1, wherein the upper portion of the flexible sealing element comprises multiple segments that are coupled to each other, wherein at least one segment is non-linear.

16. The chuck according to claim 1, wherein the flexible sealing element is formed from three segments that are coupled to each other;

wherein the segments are oriented to each other when the flexible sealing element is positioned in at least one position.

17. The chuck according to claim 1, wherein the flexible sealing element is formed from four segments that are coupled to each other;

wherein the segments are oriented to each other when the flexible sealing element is positioned in at least one position.

18. The chuck according to claim 1, wherein the groove is a first groove, the flexible sealing element is a first flexible sealing element and the region is a first region;

wherein the chuck comprises a second groove and a second flexible sealing element;

wherein at least a bottom portion of the second flexible sealing element is positioned within the groove;

wherein each one of the second groove and the second flexible sealing element surrounds a second region of the upper surface, the first groove and the first flexible sealing element;

wherein the vacuum system is configured to supply vacuum to the second region of the upper surface; and

wherein the second flexible sealing element is configured to move between a top position in which an upper portion of the second flexible sealing element extends above the upper surface and between a bottom position in which the upper portion of the second flexible sealing element does not extend above the upper surface.

19. The chuck according to claim 18, wherein the second flexible sealing element and the first flexible sealing element are of a same shape but of a different size.

20. The chuck according to claim 18, wherein the second flexible sealing element and the first flexible sealing element differ from each other by shape and size.

21. The chuck according to claim 18, wherein the second flexible sealing element and the first flexible sealing element are coaxial.

22. The chuck according to claim 18, wherein the second flexible sealing element and the first flexible sealing element are not coaxial.

23. The chuck according to claim 18, comprises a third groove and a third flexible sealing element;

wherein at least a bottom portion of the third flexible sealing element is positioned within the groove;

wherein each one of the third groove and the third flexible sealing element surrounds a third region of the upper surface, the second groove and the second flexible sealing element;

wherein the vacuum system is configured to supply vacuum to the third region of the upper surface; and

wherein the third flexible sealing element is configured to move between a top position in which an upper portion of the third flexible sealing element extends above the upper surface and between a bottom position in which the upper portion of the third flexible sealing element does not extend above the upper surface.

24. A method for supporting a substrate, the method comprises:

placing the substrate above a region of an upper surface of a chuck so that the substrate contacts a flexible sealing element of the chuck; and

supplying vacuum, by a vacuum system, to the region of the upper surface thereby flattening the substrate;

wherein at least a bottom portion of the flexible sealing element is positioned within the groove;

wherein each one of the groove and the flexible sealing element surrounds the region of the upper surface; and

wherein the flexible sealing element is configured to move between a top position in which an upper portion of the flexible sealing element extends above the upper surface and between a bottom position in which the upper portion of the flexible sealing element does not extend above the upper surface.