MASK ASSEMBLY, APPARATUS FOR MANUFACTURING DISPLAY APPARATUS, AND METHOD OF MANUFACTURING DISPLAY APPARATUS

• US 20170056911A1
• Filed: 04/06/2016
• Published: 03/02/2017
• Est. Priority Date: 08/31/2015
• Status: Active Grant

• Current Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Original Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Inventors: KANG, Seongjong
• Granted Patent: US 9,859,495 B2
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: B05C 21/005 Masking devices stencils B05C17/06; masking devices for which the means for applying liquids or other fluent material is spraying or is not important B05B12/20
• CPC Class Codes: C23C 14/042 using masks
• CPC Class Codes: H10K 59/12 Active-matrix OLED [AMOLED] displays
• CPC Class Codes: H10K 71/166 using selective deposition, e.g. using a mask

Abstract

A mask assembly and an apparatus and method of manufacturing a display apparatus. The mask assembly includes a mask frame, a plurality of mask sheets arranged on the mask frame, and a support frame arranged on the mask frame and having a portion that contacts and supports the mask sheets.

Claims

1. A mask assembly comprising:

a mask frame;

a plurality of mask sheets arranged on the mask frame; and

a support frame arranged on the mask frame, the support frame having a portion that contacts and supports the mask sheets.

2. The mask assembly of claim 1, wherein the portion of the support frame that contacts the mask sheets is higher than other portions of the support frame.

3. The mask assembly of claim 1, wherein the support frame is arranged between adjacent mask sheets.

4. The mask assembly of claim 1, wherein a center portion of the support frame contacts center portions of the mask sheets and supports the mask sheets.

5. The mask assembly of claim 1, wherein the support frame has a thermal expansion coefficient different from a thermal expansion coefficient of the mask sheets.

6. The mask assembly of claim 5, wherein the thermal expansion coefficient of the mask sheets is less than the thermal expansion coefficient of the support frame.

7. The mask assembly of claim 1, wherein the support frame has a curved shape.

8. An apparatus for manufacturing a display apparatus, the apparatus comprising:

a mask assembly facing a first substrate;

a support supporting the mask assembly; and

a deposition source facing the mask assembly and configured to spray a deposition material onto the first substrate,

wherein the mask assembly comprises;

a mask frame;

a plurality of mask sheets arranged on the mask frame; and

a support frame arranged on the mask frame, a portion of the support frame contacting and supporting the mask sheets.

9. The apparatus of claim 8, wherein the portion of the support frame that contacts the mask sheets is higher than other portions of the support frame.

10. The apparatus of claim 8, wherein the support frame is between adjacent mask sheets.

11. The apparatus of claim 8, wherein a center portion of the support frame contacts center portions of the mask sheets and supports the mask sheets.

12. The apparatus of claim 8, wherein the support frame has a thermal expansion coefficient different from a thermal expansion coefficient of the mask sheets.

13. The apparatus of claim 12, wherein the thermal expansion coefficient of the mask sheets is less than the thermal expansion coefficient of the support frame.

14. The apparatus of claim 8, wherein the support frame has a curved shape.

15. A method of manufacturing a display apparatus, the method comprising:

inserting a first substrate and a mask assembly into a chamber;

spraying a deposition material into a deposition source; and

passing the deposition material through the mask assembly and depositing the deposition material on the first substrate,

wherein the mask assembly comprises;

a mask frame;

a plurality of mask sheets on the mask frame; and

a support frame on the mask frame, a portion of the support frame contacting and supporting the mask sheets.

16. The method of claim 15, wherein the portion of the support frame that contacts the mask sheets is higher than other portions of the support frame.

17. The method of claim 15, wherein the support frame is arranged between adjacent mask sheets.

18. The method of claim 15, wherein the support frame has a thermal expansion coefficient different from a thermal expansion coefficient of the mask sheets.

19. The method of claim 15, wherein a center portion of the support frame contacts a center portion of the mask sheets and supports the mask sheets.

20. The method of claim 15, wherein the support frame has a curved shape.