MINIATURE HERMETIC ACCELERATION DETECTION DEVICE

• US 20170059607A1
• Filed: 08/17/2016
• Published: 03/02/2017
• Est. Priority Date: 09/02/2015
• Status: Active Grant

• Current Assignee: Circor Aerospace, Inc. (Circor International Incorporated)
• Original Assignee: Circor Aerospace, Inc. (Circor International Incorporated)
• Inventors: SALAMONE, Brent
• Granted Patent: US 10,422,813 B2
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: B81B 2201/016 having a bridge fixed on two ends and connected to one or more dimples
• CPC Class Codes: B81B 2201/0235 Accelerometers
• CPC Class Codes: B81B 2203/055 Translation in a plane parallel to the substrate, i.e. enabling movement along any direction in the plane
• CPC Class Codes: B81C 1/00269 Bonding of solid lids or wafers to the substrate
• CPC Class Codes: B81C 3/00 Assembling of devices or systems from individually processed components
• CPC Class Codes: G01P 1/023 for acceleration measuring devices
• CPC Class Codes: G01P 15/135 by making use of contacts which are actuated by a movable inertial mass
• CPC Class Codes: G01P 15/18 in two or more dimensions
• CPC Class Codes: G01P 2015/082 for two degrees of freedom of movement of a single mass

Abstract

A MEMS acceleration detection device including a housing having a cavity and a spring mass system assembled into the cavity of the housing. A lid enclosing the spring mass system in the cavity and contacting a top surface of the housing.

Claims

1. A MEMS acceleration detection device comprising:

a housing having a cavity;

a spring mass system assembled into the cavity of the housing; and

a lid enclosing the spring mass system in the cavity and contacting a top surface of the housing.

2. The device of claim 1, wherein upon assembly, the spring mass system maintains an interference fit with the cavity.

3. The device of claim 1, wherein the housing includes a chamfer formed along an entrance to the cavity, the lid having a first surface facing the top surface of the housing, the first surface including a stepped surface received by the chamfer for aligning the lid with the housing during assembly.

4. The device of claim 1, wherein the spring mass system comprises:

an annular ring surrounding a central mass; and

a spring positioned between the ring and the central mass, the annular ring in contact with a surface of the cavity.

5. The device of claim 4, wherein the central mass is urged into contact with at least one of a non-protruding surface in the cavity and a protrusion positioned in the cavity in response to a sufficient force in a z direction.

6. The device of claim 4, wherein the central mass is urged into contact with a protrusion positioned in the cavity in response to a sufficient force an x direction, y direction or a combination thereof.

7. The device of claim 4, wherein the central mass is urged into contact with a protrusion positioned in the cavity in response to a sufficient force in an x direction, y direction, z direction or a combination thereof.

8. The device of claim 4, wherein the annular ring includes an at least partially closable split, the split being partially closable in response to forces applied to an outer surface of the ring toward the central mass.

9. The device of claim 8, wherein the housing includes a chamfer formed along an entrance to the cavity, a size of the cavity being less than a size of the annular ring of the spring mass system in an uncompressed condition;

wherein in response to the annular ring of the spring mass system being brought into sliding contact with the chamfer during assembly of the spring mass system into the cavity, the chamfer exerts a force partially closing the split, resulting in the annular ring being in a compressed condition, the annular ring being maintained in the compressed condition after the spring mass system is assembled into the cavity.

10. A MEMS acceleration detection device comprising:

a housing having a cavity; and

a spring mass system assembled into the cavity of the housing, the spring mass system comprising;

an annular ring surrounding a central mass; and

a spring positioned between the ring and the central mass, the annular ring in contact with a surface of the cavity; and

a lid enclosing the spring mass system in the cavity and contacting a top surface of the housing.

11. The device of claim 10, wherein the housing includes a chamfer formed along an entrance to the cavity, the lid having a first surface facing the top surface of the housing, the first surface including a stepped surface received by the chamfer for aligning the lid with the housing during assembly.

12. The device of claim 10, wherein the annular ring includes an at least partially closable split, the split being partially closable in response to forces applied to an outer surface of the ring toward the central mass.

13. The device of claim 10, wherein the central mass is urged into contact with at least one of a non-protruding surface of the cavity and a protrusion positioned in the cavity in response to a sufficient force in a z direction.

14. The device of claim 10, wherein the central mass is urged into contact with a protrusion positioned in the cavity in response to a sufficient force in an x direction, y direction or a combination thereof.

15. The device of claim 10, wherein the central mass is urged into contact with a protrusion positioned in the cavity in response to a sufficient force in an x direction, y direction, z direction or a combination thereof.

16. The device of claim 12, wherein the housing includes a chamfer formed along an entrance to the cavity, a size of the cavity being less than a size of the annular ring of the spring mass system in an uncompressed condition;

wherein in response to the annular ring of the spring mass system being brought into sliding contact with the chamfer during assembly of the spring mass system into the cavity, the chamfer exerts a force partially closing the split, resulting in the annular ring being in a compressed condition, the annular ring being maintained in the compressed condition after the spring mass system is assembled into the cavity.

17. A method of manufacture of a MEMS acceleration detection device comprising:

providing a housing having a cavity;

assembling a spring mass system into the cavity of the housing; and

assembling a lid enclosing the spring mass system in the cavity and contacting a top surface of the housing.

18. The method of claim 17, wherein assembling a spring mass system into the cavity of the housing results in an interference fit between the spring mass system and the cavity.

19. The method of claim 17, wherein assembling a spring mass system into the cavity of the housing further comprises:

slidably contacting an annular ring of the spring mass system with a chamfer formed along an entrance to the cavity, the chamfer exerting a force partially closing a split formed in the annular ring, resulting in the annular ring being in a compressed condition, the annular ring being maintained in the compressed condition after the spring mass system is assembled into the cavity.

20. The method of claim 17, wherein assembling a lid enclosing the spring mass system in the cavity further comprises:

aligning the lid with the housing during assembly, wherein the housing including a top surface and a chamfer formed along an entrance to the cavity, the lid having a first surface facing the top surface of the housing, the first surface including a stepped surface received by the chamfer during assembly.