×

MINIATURE HERMETIC ACCELERATION DETECTION DEVICE

  • US 20170059607A1
  • Filed: 08/17/2016
  • Published: 03/02/2017
  • Est. Priority Date: 09/02/2015
  • Status: Active Grant
First Claim
Patent Images

1. A MEMS acceleration detection device comprising:

  • a housing having a cavity;

    a spring mass system assembled into the cavity of the housing; and

    a lid enclosing the spring mass system in the cavity and contacting a top surface of the housing.

View all claims
  • 8 Assignments
Timeline View
Assignment View
    ×
    ×