SUBSTRATE COMPRISING AN EMBEDDED INDUCTOR AND A THIN FILM MAGNETIC CORE
First Claim
1. A substrate comprising:
- a first dielectric layer;
a magnetic core at least partially in the first dielectric layer, wherein the magnetic core comprises a first non-horizontal thin film magnetic (TFM) layer; and
a first inductor comprising a plurality of first interconnects, wherein the first inductor is positioned in the substrate to at least partially surround the magnetic core.
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Accused Products
Abstract
A substrate includes a first dielectric layer, a magnetic core at least partially in the first dielectric layer, where the magnetic core comprises a first non-horizontal thin film magnetic (TFM) layer. The substrate also includes a first inductor that includes a plurality of first interconnects, where the first inductor is positioned in the substrate to at least partially surround the magnetic core. The magnetic core may further include a second non-horizontal thin film magnetic (TFM) layer. The magnetic core may further include a core layer. The magnetic core may further include a third thin film magnetic (TFM) layer, and a fourth thin film magnetic (TFM) layer that is substantially parallel to the third thin film magnetic (TFM) layer.
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Citations
30 Claims
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1. A substrate comprising:
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a first dielectric layer; a magnetic core at least partially in the first dielectric layer, wherein the magnetic core comprises a first non-horizontal thin film magnetic (TFM) layer; and a first inductor comprising a plurality of first interconnects, wherein the first inductor is positioned in the substrate to at least partially surround the magnetic core. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. A method for fabricating a substrate, comprising:
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forming a first dielectric layer; forming a first non-horizontal thin film magnetic (TFM) layer in the first dielectric layer, to form a magnetic core that is at least partially in the first dielectric layer; and forming a plurality of first interconnects in at least the first dielectric layer to form a first inductor that at least partially surrounds the magnetic core. - View Dependent Claims (21, 22, 23, 24, 25, 26, 27, 28, 29, 30)
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Specification