NITRIDE SEMICONDUCTOR ELEMENT AND METHOD FOR MANUFACTURING THE SAME
First Claim
Patent Images
1. A nitride semiconductor element comprising:
- a sapphire substrate comprising a plurality of projections disposed on a surface thereof at a c-plane side; and
a semiconductor layer made of a nitride semiconductor and disposed on the surface of the sapphire substrate,wherein each projection comprises a circular bottom periphery, and an upper part that has a triangular pyramid shape, andwherein respective centers of the projections are positioned at lattice points of a triangular lattice.
0 Assignments
0 Petitions
Accused Products
Abstract
A method of manufacturing a nitride semiconductor element includes dry etching a main surface of a sapphire substrate at a c-plane side thereof, using a mask provided on the main surface, to form a plurality of projections, each having a circular bottom surface; wet etching the sapphire substrate to form an upper part of each projection into a triangular pyramid shape while maintaining the circular bottom surface of the projection; and growing a semiconductor layer made of a nitride semiconductor on a dry etched surface and a wet etched surface of the sapphire substrate.
-
Citations
14 Claims
-
1. A nitride semiconductor element comprising:
-
a sapphire substrate comprising a plurality of projections disposed on a surface thereof at a c-plane side; and a semiconductor layer made of a nitride semiconductor and disposed on the surface of the sapphire substrate, wherein each projection comprises a circular bottom periphery, and an upper part that has a triangular pyramid shape, and wherein respective centers of the projections are positioned at lattice points of a triangular lattice. - View Dependent Claims (2, 3, 4, 5, 6, 7)
-
-
8. A method of manufacturing a nitride semiconductor element, the method comprising:
-
dry etching a main surface of a sapphire substrate at a c-plane side thereof, with a mask provided on the main surface, thus forming a plurality of projections, wherein each projection comprises a circular bottom periphery, and wherein respective centers of the projections are positioned at lattice points of a triangular lattice; wet etching the sapphire substrate, thus forming an upper part of each projection into a triangular pyramid shape while maintaining the circular bottom periphery of each projection; and growing a semiconductor layer made of a nitride semiconductor on the sapphire substrate after said dry etching and wet etching. - View Dependent Claims (9, 10, 11, 12, 13, 14)
-
Specification