SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
First Claim
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1. A semiconductor device comprising:
- a base substrate;
an insulating layer formed on the base substrate;
a first optical waveguide composed of a semiconductor layer formed on the insulating layer; and
a first insulating film formed along an upper surface of the insulating layer and a front surface of the first optical waveguide,wherein a first peripheral edge portion of a first lower surface of the first optical waveguide is separated from the insulating layer, andthe first insulating film is buried between the first peripheral edge portion and the insulating layer.
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Abstract
A semiconductor device is provided with an insulating layer formed on a base substrate, an optical waveguide composed of a semiconductor layer formed on the insulating layer, and an insulating film formed along an upper surface of the insulating layer and a front surface of the optical waveguide. A peripheral edge portion of a lower surface of the optical waveguide is separated from the insulating layer, and the insulating film is buried between the peripheral edge portion and the insulating layer.
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Citations
14 Claims
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1. A semiconductor device comprising:
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a base substrate; an insulating layer formed on the base substrate; a first optical waveguide composed of a semiconductor layer formed on the insulating layer; and a first insulating film formed along an upper surface of the insulating layer and a front surface of the first optical waveguide, wherein a first peripheral edge portion of a first lower surface of the first optical waveguide is separated from the insulating layer, and the first insulating film is buried between the first peripheral edge portion and the insulating layer. - View Dependent Claims (2, 3, 4, 5)
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6. A method for manufacturing a semiconductor device comprising the steps of:
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(a) preparing a semiconductor substrate having a base substrate, an insulating layer formed on the base substrate, and a semiconductor layer formed on the insulating layer; (b) patterning the semiconductor layer to form a first optical waveguide composed of the semiconductor layer; and (c) forming a first insulating film along an upper surface of the insulating layer and a front surface of the first optical waveguide, wherein upon carrying out the step (b), a first gap is formed between a first peripheral edge portion of a first lower surface of the first optical waveguide and the insulating layer, and in step (c), the first gap is buried by the first insulating film. - View Dependent Claims (7, 8, 9, 10, 11, 12, 13, 14)
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Specification