PHYSICAL QUANTITY SENSOR
First Claim
1. A physical quantity sensor, comprising:
- an acceleration sensor outputting a sensor signal corresponding to acceleration;
an angular velocity sensor having a vibrating element made of a piezoelectric material, generating charges corresponding to an angular velocity when the angular velocity is applied while the vibration element is vibrating, and outputting a sensor signal corresponding to the charges;
a circuit board performing predetermined processing on the angular velocity sensor and the acceleration sensor;
a housing portion provided with a recessed portion in a surface of the housing portion to house the acceleration sensor, the angular velocity sensor, and the circuit board in the recessed portion; and
an anti-vibration portion situated between the housing portion and the vibrating element in the angular velocity sensor, whereinthe angular velocity sensor and the acceleration sensor are spaced apart, the circuit board is arranged on a bottom surface of the recessed portion through a first connecting member, andthe acceleration sensor is stacked on the circuit board through a second connecting member, andthe acceleration sensor is a vibrating system at three degrees of freedom in reference to the angular velocity sensor.
1 Assignment
0 Petitions
Accused Products
Abstract
Within a housing portion in which a recessed portion is formed, a circuit board is arranged on the bottom surface of the recessed portion, through a first connecting member. An acceleration sensor is stacked on the circuit board, through a second connecting member. Hence, sections that function as three or more springs, i.e., an anti-vibration portion, the first connecting member, and the second connecting member, are situated between an angular velocity sensor and the acceleration sensor. For this reason, transmission of vibration of the vibrating element in the angular velocity sensor to the acceleration sensor can be restricted, and reduction in the detection accuracy of the acceleration sensor can be restricted.
11 Citations
8 Claims
-
1. A physical quantity sensor, comprising:
-
an acceleration sensor outputting a sensor signal corresponding to acceleration; an angular velocity sensor having a vibrating element made of a piezoelectric material, generating charges corresponding to an angular velocity when the angular velocity is applied while the vibration element is vibrating, and outputting a sensor signal corresponding to the charges; a circuit board performing predetermined processing on the angular velocity sensor and the acceleration sensor; a housing portion provided with a recessed portion in a surface of the housing portion to house the acceleration sensor, the angular velocity sensor, and the circuit board in the recessed portion; and an anti-vibration portion situated between the housing portion and the vibrating element in the angular velocity sensor, wherein the angular velocity sensor and the acceleration sensor are spaced apart, the circuit board is arranged on a bottom surface of the recessed portion through a first connecting member, and the acceleration sensor is stacked on the circuit board through a second connecting member, and the acceleration sensor is a vibrating system at three degrees of freedom in reference to the angular velocity sensor. - View Dependent Claims (2, 3, 4, 5, 6, 8)
-
-
7. The physical quantity sensor according to clam 1, wherein
the anti-vibration portion is a metal member situated between the angular velocity sensor and the housing portion.
Specification