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PHYSICAL QUANTITY SENSOR, SENSOR DEVICE, ELECTRONIC APPARATUS, AND MOVING OBJECT

  • US 20170074658A1
  • Filed: 09/09/2016
  • Published: 03/16/2017
  • Est. Priority Date: 09/15/2015
  • Status: Active Grant
First Claim
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1. A physical quantity sensor comprising:

  • a substrate;

    a movable object that is oscillatably provided around a center of oscillation axis while facing the substrate and that is divided into a first movable portion and a second movable portion of which an area is larger than that of the first movable portion with the center of oscillation axis as a boundary in a plan view seen from a thickness direction of the substrate;

    a first electrode that is disposed on the substrate facing the first movable portion; and

    a second electrode that is disposed on the substrate facing the second movable portion,wherein the first electrode and the second electrode are configured so as to offset at least a part of a difference between a first fringe capacitance, which is between the first movable portion and the first electrode, and a second fringe capacitance, which is between the second movable portion and the second electrode.

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