BOLOMETER AND METHOD FOR MEASUREMENT OF ELECTROMAGNETIC RADIATION
First Claim
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1. A bolometer, comprising:
- a first and a second suspension beam anda semiconductor portion that is suspended by the first and the second suspension beam and comprises a first region of a first conductivity type and a second region of a second conductivity type, wherein the first region comprises at least two stripes or islands which each contribute to a non-short-circuited diode with the second region andwherein the at least two stripes of the first region or the at least two islands of the first region are electrically connected to each other and to the first suspension beam by a metal connection.
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Abstract
A bolometer (10) comprises a first and a second suspension beam (12, 13) and a semiconductor portion (11) that is suspended by the first and the second suspension beam (12, 13) and comprises a first region (17) of a first conductivity type and a second region (18) of a second conductivity type. The first region (17) comprises a first triangle (21) or at least two stripes (40, 41) or islands (60, 61) which each contribute to a non-short-circuited diode (20) with the second region (18).
3 Citations
16 Claims
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1. A bolometer, comprising:
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a first and a second suspension beam and a semiconductor portion that is suspended by the first and the second suspension beam and comprises a first region of a first conductivity type and a second region of a second conductivity type, wherein the first region comprises at least two stripes or islands which each contribute to a non-short-circuited diode with the second region and wherein the at least two stripes of the first region or the at least two islands of the first region are electrically connected to each other and to the first suspension beam by a metal connection. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 13, 14)
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12. A method for measurement of electromagnetic radiation, comprising:
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setting a diode of a bolometer in an operating point, absorbing the electromagnetic radiation by the bolometer and measuring of an electrical parameter of the diode in the operating point, wherein the bolometer comprises a first and a second suspension beam and a semiconductor portion which is suspended by the first and the second suspension beam and comprises a first region of a first conductivity type and a second region of a second conductivity type, wherein the first region comprises at least two stripes or islands which each contribute to the non-short-circuited diode with the second region, wherein the at least two stripes of the first region or the at least two islands of the first region are electrically connected to each other and to the first suspension beam by a metal connection.
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15. A bolometer, comprising
a first and a second suspension beam and a semiconductor portion which is suspended by the first and the second suspension beam and comprises a first region of a first conductivity type and a second region of a second conductivity type, wherein the first region comprises a first triangle or at least two stripes or islands which each contribute to a diode with the second region.
Specification