PROBE

• US 20170074789A1
• Filed: 08/09/2016
• Published: 03/16/2017
• Est. Priority Date: 09/14/2015
• Status: Active Grant

• Current Assignee: Advantest Corporation
• Original Assignee: Advantest Corporation
• Inventors: ATAKA, Tsuyoshi
• Granted Patent: US 10,088,415 B2
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: G01N 21/3581 using far infrared light; using Terahertz radiation

Abstract

A probe includes a transmission line support substrate, a probe tip and a probe tip support substrate. The transmission line support substrate supports a transmission line through which a terahertz wave is transmitted. The probe tip transmits the terahertz wave, and is contact with an object to be measured. The probe tip support substrate supports the probe tip. The probe tip support substrate is detachable from the transmission line support substrate.

Claims

1. A probe comprising:

a transmission line support substrate that supports a transmission line through which a terahertz wave is transmitted;

a probe tip that transmits the terahertz wave, and is contact with an object to be measured; and

a probe tip support substrate that supports the probe tip,

wherein the probe tip support substrate is detachable from the transmission line support substrate.

2. The probe according to claim 1, wherein the probe tip support substrate is attached via an intermediate substrate to the transmission line support substrate.

3. The probe according to claim 1, wherein a part or an entirety of the probe tip inclines with respect to the probe tip support substrate.

4. The probe according to claim 1, wherein the probe tip is attached to the probe tip support substrate in parallel with the probe tip support substrate.

5. The probe according to claim 1, wherein the probe tip support substrate supports the probe tip via a cable.

6. The probe according to claim 1, wherein a rise-time filter is provided for the probe tip support substrate.