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BACKSIDE COUPLED SYMMETRIC VARACTOR STRUCTURE

  • US 20170077093A1
  • Filed: 10/19/2016
  • Published: 03/16/2017
  • Est. Priority Date: 09/14/2015
  • Status: Active Grant
First Claim
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1. A method of fabricating a symmetric varactor structure, comprising:

  • fabricating a first varactor component adjacent to a second varactor component of the symmetric varactor structure on an isolation layer;

    thinning the symmetric varactor structure to expose a body of the first varactor component and a body of the second varactor component; and

    depositing and patterning a conductive layer to couple the body of the first varactor component and the body of the second varactor component.

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