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SEMI-FLEXIBLE PROOF-MASS

  • US 20170082519A1
  • Filed: 09/12/2016
  • Published: 03/23/2017
  • Est. Priority Date: 09/22/2015
  • Status: Active Grant
First Claim
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1. A microelectromechanical device, comprising:

  • a substantially planar semi-flexible proof-mass comprising at least one primary part and at least one secondary part, and at least one stiff spring coupling the at least one primary part and the at least one secondary part of the semi-flexible proof-mass, the at least one stiff spring substantially causing the at least one primary part and the at least one secondary part to move as a single, rigid entity when the device is in a normal operation range;

    at least one main spring coupled to the at least one secondary part, the main spring coupling the semi-flexible proof-mass to a suspension structure; and

    at least one first stopper structure configured to stop the at least one primary part,wherein the semi-flexible proof-mass is configured to deform through deflection of the at least one stiff spring, when the device is subjected to a shock that impacts the device with a force that is beyond the normal operation range of the device, the shock causing a motion of the semi-flexible proof-mass at least in a direction along an axis of movement, andwherein the at least one stiff spring further causes a restoring force causing the at least one secondary part of the semi-flexible proof-mass to be driven into a restoring motion in a direction opposite to the motion along the axis of movement caused by the shock, wherein momentum of the at least one secondary part in the restoring motion further causes the at least one primary part to dislodge from the at least one first stopper structure.

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