ELECTRO-OPTICAL DEVICE, ELECTRO-OPTICAL DEVICE MANUFACTURING METHOD, AND ELECTRONIC APPARATUS

• US 20170082893A1
• Filed: 06/28/2016
• Published: 03/23/2017
• Est. Priority Date: 09/17/2015
• Status: Abandoned Application

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: Ito, Satoshi
• Application Number:
  US15/195,993
• Publication Number:
  US 20170082893A1
• Time in Patent Office: Days
• CPC Class Codes: G02B 27/0961 Lens arrays lens arrays per se G02B3/0006
• CPC Class Codes: G02B 27/285 comprising arrays of elements, e.g. microprisms
• CPC Class Codes: G02B 3/0056 arranged along two different directions in a plane, e.g. honeycomb arrangement of lenses G02B3/0043 takes precedence; miniaturised objectives for electronic devices employing wafer level optics G02B13/0085
• CPC Class Codes: G02B 3/0068 arranged in a single integral body or plate, e.g. laminates or hybrid structures with other optical elements G02B5/1885, G02B17/002, G02B30/27 take precedence
• CPC Class Codes: G02F 1/133526 Lenses, e.g. microlenses or Fresnel lenses
• CPC Class Codes: G02F 2203/12 spatial light modulator

Abstract

An element substrate of an electro-optical device includes a light-transmitting substrate on one surface of which a plurality of lens surfaces including a concave surface are formed, and a light-transmitting lens layer that covers the plurality of lens surfaces. On one surface of the substrate, a recess region, which includes a concave-shaped lens forming region in which the plurality of lens surfaces are arranged, is formed. The plurality of lens surfaces are provided at the bottom of the recess region. The lens layer is provided such that the inner side of the recess region is filled. The surface of the lens layer on a side opposite to the substrate forms, on one surface of the substrate, a plane surface which is contiguous to an outside region positioned on an outer side of the recess region. The lens layer is not formed in the outside region.

Claims

1. An electro-optical device comprising:

a light-transmitting substrate that has a lens surface which include concave surface or convex surface on one surface of the light-transmitting substrate;

a light-transmitting lens layer that covers the lens surface; and

a pixel electrode that is provided over the lens layer on a side opposite to the substrate and overlaps the lens surface in plan view,

wherein the one surface of the light-transmitting lens layer has a recess region provided the lens surface and an outside region positioned at an outer side of the recess region,

wherein the lens surface is provided at a bottom of the recess region,

wherein the lens layer is provided such that an inner side of the recess region is filled, and

wherein a surface of the lens layer on the side opposite to the substrate and a surface of the outside region have a plane surface which is contiguous with each other.

2. The electro-optical device according to claim 1,

wherein at least some parts of the lens surface are connected to at least some parts of adjacent lens surfaces.

3. The electro-optical device according to claim 2,

wherein all circumferences of the lens surface is connected to any of lens surfaces which are positioned around the lens surface.

4. The electro-optical device according to claim 1,

wherein a concave-shaped curved surface is formed between a side surface and the bottom of the recess region.

7. An electronic apparatus comprising an electro-optical device according to claim 1.

8. An electronic apparatus comprising an electro-optical device according to claim 2.

9. An electronic apparatus comprising an electro-optical device according to claim 3.

10. An electronic apparatus comprising an electro-optical device according to claim 4.

5. An electro-optical device manufacturing method comprising:

forming a recess region on one surface of a light-transmitting substrate;

forming a plurality of lens surfaces that include concave surfaces or convex surfaces at a bottom of the recess region;

forming a light-transmitting lens layer on one surface of the substrate such that an inside of the recess region is filled;

flattening the lens layer from a side opposite to the substrate and causing a surface of the lens layer on the side opposite to the substrate to form, on one surface of the substrate, a plane surface which is contiguous with an outside region positioned on an outer side of the recess region; and

forming a plurality of pixel electrodes that overlap the plurality of respective lens surfaces in a plan view on the side opposite to the substrate.

6. The electro-optical device manufacturing method according to claim 5,

wherein the forming of the recess region includes performing wet etching on one surface in a state in which an etching mask is formed on one surface of the substrate.