ULTRASONIC POLISHING SYSTEMS AND METHODS OF POLISHING BRITTLE COMPONENTS FOR ELECTRONIC DEVICES
First Claim
1. An ultrasonic polishing system for polishing a non-planar feature formed in a brittle component, the system comprising:
- an ultrasonic driver;
a polishing head operatively coupled to the ultrasonic driver and having a surface shape that corresponds to the non-planar feature formed in the brittle component; and
an abrasive slurry configured to be disposed between the non-planar feature of the brittle component and the polishing head;
whereinthe ultrasonic driver is configured to displace the polishing head toward and away from the non-planar feature formed in the brittle component.
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Abstract
Ultrasonic polishing systems and methods of polishing brittle components for electronic devices using ultrasonic polishing systems are disclosed. The ultrasonic polishing system may include an ultrasonic driver and a polishing head operatively coupled to the ultrasonic driver. The ultrasonic drive may have a surface shape that corresponds to a non-planar feature formed in the brittle component. The ultrasonic polishing system may also include an abrasive slurry configured to be disposed between the non-planar feature of the brittle component and the polishing head. The ultrasonic driver may be configured to displace the polishing head toward and away from the non-planar feature formed in the brittle component.
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Citations
20 Claims
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1. An ultrasonic polishing system for polishing a non-planar feature formed in a brittle component, the system comprising:
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an ultrasonic driver; a polishing head operatively coupled to the ultrasonic driver and having a surface shape that corresponds to the non-planar feature formed in the brittle component; and an abrasive slurry configured to be disposed between the non-planar feature of the brittle component and the polishing head;
whereinthe ultrasonic driver is configured to displace the polishing head toward and away from the non-planar feature formed in the brittle component. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method for polishing a non-planar feature of a brittle component, the method comprising:
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positioning a polishing head adjacent the non-planar feature of the brittle component, the brittle component at least partially submerged in an abrasive slurry disposed within a housing; moving, at an ultrasonic frequency, at least one of the housing or the polishing head in at least one of; a first direction;
ora second direction, perpendicular to the first direction; and in response to moving at least one of the housing of the polishing head, displacing the abrasive slurry to abrade and polish the non-planar feature of the brittle component;
whereinthe polishing head comprises a surface shape that corresponds to the non-planar feature of the brittle component. - View Dependent Claims (10, 11, 12, 13, 14)
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15. An ultrasonic polishing system comprising:
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a housing for receiving a brittle component comprising a non-planar feature; a polishing head positioned within the housing, the polishing head having a surface shape that corresponds to the non-planar feature formed in the brittle component; an abrasive slurry positioned within the housing, the abrasive slurry comprising a solid abrasive material suspended in a liquid; and an ultrasonic driver configured to move at least one of the housing or the polishing head at an ultrasonic frequency to polish the non-planar feature of the brittle component using the abrasive slurry. - View Dependent Claims (16, 17, 18, 19, 20)
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Specification