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ULTRASONIC POLISHING SYSTEMS AND METHODS OF POLISHING BRITTLE COMPONENTS FOR ELECTRONIC DEVICES

  • US 20170087687A1
  • Filed: 09/29/2016
  • Published: 03/30/2017
  • Est. Priority Date: 09/30/2015
  • Status: Active Grant
First Claim
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1. An ultrasonic polishing system for polishing a non-planar feature formed in a brittle component, the system comprising:

  • an ultrasonic driver;

    a polishing head operatively coupled to the ultrasonic driver and having a surface shape that corresponds to the non-planar feature formed in the brittle component; and

    an abrasive slurry configured to be disposed between the non-planar feature of the brittle component and the polishing head;

    whereinthe ultrasonic driver is configured to displace the polishing head toward and away from the non-planar feature formed in the brittle component.

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