SAMPLE POSITIONING METHOD AND CHARGED PARTICLE BEAM APPARATUS

• US 20170092460A1
• Filed: 09/28/2016
• Published: 03/30/2017
• Est. Priority Date: 09/30/2015
• Status: Active Grant

• Current Assignee: Hitachi High-Tech Science Corporation (Hitachi, Ltd.)
• Original Assignee: Hitachi High-Tech Science Corporation (Hitachi, Ltd.)
• Inventors: TAKENO, Kengo, KIYOHARA, Masahiro, UEMOTO, Atsushi, UMEMURA, Kaoru
• Granted Patent: US 10,186,398 B2
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: H01J 2237/20292 Means for position and/or orientation registration
• CPC Class Codes: H01J 37/20 Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support introducing the objects H01J37/18
• CPC Class Codes: H01J 37/22 Optical or photographic arrangements associated with the tube using a CRT for the display of the image in a scanning electron microscope H01J37/28; observing the object or the point of impact on the object in tubes for the localised treatment of materials H01J37/3007

Abstract

The present invention provides a sample positioning method that can easily and quickly position a target observation area of a sample into a field of view of a first charged particle beam. The method includes: displaying an image including the sample in a display screen; designating an attention point on the basis of the image in the display screen; aligning the position of the sample stage in the direction of an optical axis so that the attention point is positioned in an on-axis point tracer plane perpendicular to the optical axis through an on-axis target point on the optical axis; and moving the attention point to the on-axis target point by performing detection of deviation of the attention point from the on-axis target point and movement in the on-axis point tracer plane; and moving the attention point into a depth of a focus of an charged particle beam optics.

Claims

1. A sample positioning method of positioning a target observation area of a sample, which is disposed on a sample stage in a sample chamber of a charged particle beam apparatus, into a field of view of a first charged particle beam radiated from a charged particle beam optical optics installed in a first charged particle beam column, the method including:

displaying an image of inside of the sample chamber including the sample on the sample stage therein in a display screen of a display unit;

designating an attention point on the target observation area on the basis of the image on the display screen;

aligning the sample stage in a direction of a first optical axis so that the attention point is positioned on an on-axis point tracer plane perpendicular to the first optical axis through an on-axis target point on the first optical axis of the first charged particle beam column;

after positioning the attention point on the on-axis point tracer plane, performing detection of deviation of the attention point from the on-axis target point on the display screen and movement of the sample stage within the on-axis point tracer plane only in a direction perpendicular to the first optical axis, and moving the attention point to the on-axis target point; and

after moving the attention point to the on-axis target point, moving the attention point within depth of focus of the charged particle beam optical optics by moving the sample stage along the first optical axis.

2. The method of claim 1, further including displaying sub-markers indicating the position of the on-axis target point and a position of the first optical axis on the display screen at least when moving the attention point to the on-axis target point to assist the movement of the attention point.

3. A charged particle beam apparatus including:

a first charged particle beam column having a charged particle beam optical optics and radiating a first charged particle beam using the charged particle beam optical optics;

a sample stage to place a sample thereon and moving at least along the direction of a first optical axis of the first charged particle beam column and in a direction perpendicular to the first optical axis;

a sample chamber with the sample stage therein;

a chamber scope capturing an image of an inside of the sample chamber including the sample on the sample stage;

a display unit displaying the image captured by the chamber scope;

an attention point position control device receiving input for designating an attention point on the image displayed on the display screen, and obtaining information about a position on the display screen of the attention point accompanying movement of the sample stage;

a sample stage movement control device performing stage-positioning control for aligning the sample stage along a direction of a first optical axis of the first charged particle beam column so that the attention point is positioned on an on-axis point tracer plane perpendicular to the first optical axis through an on-axis target point on the first optical axis, movement control within an on-axis point tracer plane for moving the sample stage only in a direction perpendicular to the first optical axis, and on-axis movement control for moving the attention point within the depth of focus of the charged particle beam optical optics by moving the sample stage along the first optical axis;

a sub-marker display control device displaying a sub-marker indicating a position of the on-axis target point and a sub-marker indicating a position of the first optical axis; and

a stage operator inputting operation instructions for the sample stage movement control device.

4. The apparatus of claim 3, further including:

a secondary charged particle beam column radiating a secondary charged particle beam along a second optical axis intersecting the first optical axis of the first charged particle beam column and intersecting a capturing direction of the chamber scope; and

an image generator, capturing an image of the sample by radiating the secondary charged particle beam to the sample,

wherein the sample stage movement control device can perform movement control within the field of view for adjusting a position of the attention point within a field of view of the secondary charged particle beam column during the on-axis movement control.

5. A charged particle beam apparatus including:

a first charged particle beam column having a charged particle beam optical optics and radiating a first charged particle beam using the charged particle beam optical optics;

a sample stage placing a sample thereon and moving at least along the direction of a first optical axis of the first charged particle beam column and in a direction perpendicular to the first optical axis;

a sample chamber placing the sample stage therein;

a chamber scope capturing an image of an inside of the sample chamber including the sample on the sample stage;

a display unit displaying the image captured by the chamber scope;

an attention point position control device receiving input for designating an attention point on the image displayed on the display screen, and obtaining information about a position on the display screen of the attention point accompanying movement of the sample stage;

a sample stage movement control device performing stage-positioning control for aligning the sample stage along a direction of a first optical axis of the first charged particle beam column so that the attention point is positioned on an on-axis point tracer plane perpendicular to the first optical axis through an on-axis target point on the first optical axis, movement control within an on-axis point tracer plane for moving the sample stage only in a direction perpendicular to the first optical axis, and on-axis movement control for moving the attention point within the depth of focus of the charged particle beam optical optics by moving the sample stage along the first optical axis; and

a positioning control device which, after making the sample stage movement control device perform the stage positioning control, moves the attention point to the on-axis target point by making the sample stage movement control device perform the movement control within an on-axis point tracer plane on the basis of deviation of the attention point from the on-axis target point on the display screen, and makes the sample stage movement control device perform the on-axis movement control after the attention point is moved to the on-axis target point.

6. The apparatus of claim 5, further including:

a secondary charged particle beam column radiating a secondary charged particle beam along a second optical axis intersecting the first optical axis of the first charged particle beam column and intersecting a capturing direction of the chamber scope; and

an image generator, capturing an image of the sample by radiating the secondary charged particle beam to the sample,

wherein the sample stage movement control device can perform movement control within the field of view for adjusting a position of the attention point within a field of view of the secondary charged particle beam column during the on-axis movement control.