MAGNETIC MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME
First Claim
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1. A magnetic memory device comprising:
- a magnetic tunnel junction pattern comprising a first free layer, a pinned layer, and a tunnel barrier layer between the first free layer and the pinned layer,wherein the first free layer comprises;
a first free magnetic pattern having a first surface in direct contact with the tunnel barrier layer and a second surface opposite to the first surface; and
a second free magnetic pattern in contact with the second surface of the first free magnetic pattern,wherein the second free magnetic pattern comprises iron-nickel (FeNi), andwherein a nickel content of the second free magnetic pattern ranges from about 10 at % to about 30 at %.
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Abstract
A magnetic memory device includes a magnetic tunnel junction pattern including a first free layer, a pinned layer, and a tunnel barrier layer between the first free layer and the pinned layer. The first free layer includes a first free magnetic pattern having a first surface in direct contact with the tunnel barrier layer and a second surface opposite to the first surface, and a second free magnetic pattern in contact with the second surface. The second free magnetic pattern includes iron-nickel (FeNi), and a nickel content of the second free magnetic pattern ranges from about 10 at % to about 30 at %.
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Citations
30 Claims
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1. A magnetic memory device comprising:
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a magnetic tunnel junction pattern comprising a first free layer, a pinned layer, and a tunnel barrier layer between the first free layer and the pinned layer, wherein the first free layer comprises; a first free magnetic pattern having a first surface in direct contact with the tunnel barrier layer and a second surface opposite to the first surface; and a second free magnetic pattern in contact with the second surface of the first free magnetic pattern, wherein the second free magnetic pattern comprises iron-nickel (FeNi), and wherein a nickel content of the second free magnetic pattern ranges from about 10 at % to about 30 at %. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11-15. -15. (canceled)
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16. A magnetic memory device comprising:
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a magnetic tunnel junction pattern comprising a free layer, a pinned layer, and a tunnel barrier layer between the free layer and the pinned layer, wherein the free layer comprises; a first free magnetic pattern adjacent to the tunnel barrier layer; and a second free magnetic pattern spaced apart from the tunnel barrier layer with the first free magnetic pattern interposed therebetween, the second free magnetic pattern adjacent to the first free magnetic pattern, wherein the first free magnetic pattern comprises cobalt-iron-boron (CoFeB), wherein the second free magnetic pattern comprises iron-nickel (FeNi), and wherein a nickel content of the second free magnetic pattern ranges from about 10 at % to about 30 at %. - View Dependent Claims (17, 18)
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19-23. -23. (canceled)
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24. A magnetic memory device comprising:
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a magnetic tunnel junction pattern comprising a free layer, a pinned layer, and a tunnel barrier layer between the free layer and the pinned layer; wherein the free layer comprises; a first free magnetic pattern; and a second free magnetic pattern on the first free magnetic pattern such that the first free magnetic pattern is between the second free magnetic pattern and the tunnel barrier layer, the second free magnetic pattern having a nickel content that is greater than a nickel content of the first free magnetic pattern. - View Dependent Claims (25, 26, 27, 28, 29, 30)
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Specification