FLOW RATE ADJUSTMENT APPARATUS
First Claim
1. A flow rate adjustment apparatus comprising:
- a flow rate measurement mechanism that is attached to an installation surface; and
a flow rate adjustment mechanism that is separably attached to the flow rate measurement mechanism, whereinthe flow rate measurement mechanism includes;
a flow rate measurement unit that measures a flow rate of a fluid that flows through a first flow passage; and
a first casing unit that houses the flow rate measurement unit thereinside and can be attached to the installation surface,the flow rate adjustment mechanism includes;
a drive unit that moves a valve body part along an axis line intersecting with the installation surface;
a control unit that controls the movement of the valve body part by the drive unit;
a valve main body in which a valve chamber that houses the valve body part, a second flow passage that communicates with a valve hole into which the valve body part is inserted, and a third flow passage that is connected to an external flow passage have been formed; and
a second casing unit that houses the drive unit and the control unit thereinside and is attached to the valve main body, whereinthe flow rate adjustment mechanism is attached to the flow rate measurement mechanism in a state where a clearance communicating with an outside is provided between the first casing unit and the valve main body, andthe flow rate measurement unit has a coupling part that couples the second flow passage extending along the axis line to the first flow passage.
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Accused Products
Abstract
There is provided a flow rate adjustment apparatus in which a flow rate measurement mechanism includes: a thermal flowmeter; and a lower casing, a flow rate adjustment mechanism includes: an electric drive mechanism that moves a valve body part; a control board; a valve main body in which a valve chamber, a second flow passage that communicates with a valve hole, and a third flow passage that is connected to an external flow passage have been formed; and an upper casing that houses the electric drive mechanism and the control board thereinside, the flow rate adjustment mechanism is attached to the flow rate measurement mechanism in a state where a clearance communicating with an outside is provided between the lower casing and the valve main body, and in which the thermal flowmeter has a coupling part that couples the second flow passage to a first flow passage.
17 Citations
5 Claims
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1. A flow rate adjustment apparatus comprising:
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a flow rate measurement mechanism that is attached to an installation surface; and a flow rate adjustment mechanism that is separably attached to the flow rate measurement mechanism, wherein the flow rate measurement mechanism includes; a flow rate measurement unit that measures a flow rate of a fluid that flows through a first flow passage; and a first casing unit that houses the flow rate measurement unit thereinside and can be attached to the installation surface, the flow rate adjustment mechanism includes; a drive unit that moves a valve body part along an axis line intersecting with the installation surface; a control unit that controls the movement of the valve body part by the drive unit; a valve main body in which a valve chamber that houses the valve body part, a second flow passage that communicates with a valve hole into which the valve body part is inserted, and a third flow passage that is connected to an external flow passage have been formed; and a second casing unit that houses the drive unit and the control unit thereinside and is attached to the valve main body, wherein the flow rate adjustment mechanism is attached to the flow rate measurement mechanism in a state where a clearance communicating with an outside is provided between the first casing unit and the valve main body, and the flow rate measurement unit has a coupling part that couples the second flow passage extending along the axis line to the first flow passage. - View Dependent Claims (2, 3, 4, 5)
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Specification