METHODOLOGY FOR CHAMBER PERFORMANCE MATCHING FOR SEMICONDUCTOR EQUIPMENT
First Claim
1. A method for calibrating a processing chamber for semiconductor manufacturing process, comprising:
- performing a first predetermined process in a processing chamber;
collecting a first set of signals transmitted from a first group of sensors disposed in the processing chamber to a controller while performing the predetermined process;
analyzing the collected first set of signals;
comparing the collected first set of signals with database stored in the controller to check sensor responses from the first group of sensors;
calibrating sensors based on the collected first set of signals when a mismatch sensor response is found;
subsequently performing a first series of processes in the processing chamber; and
collecting a second set of signals transmitted from the sensors to the controller while performing the series of processes.
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Abstract
Embodiments of the present disclosure provide methodology to match and calibrate processing chamber performance in a processing chamber. In one embodiment, a method for calibrating a processing chamber for semiconductor manufacturing process includes performing a first predetermined process in a processing chamber, collecting a first set of signals transmitted from a first group of sensors disposed in the processing chamber to a controller while performing the predetermined process, analyzing the collected first set of signals, comparing the collected first set of signals with database stored in the controller to check sensor responses from the first group of sensors, calibrating sensors based on the collected first set of signals when a mismatch sensor response is found, subsequently performing a first series of processes in the processing chamber, and collecting a second set of signals transmitted from the sensors to the controller while performing the series of processes.
8 Citations
20 Claims
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1. A method for calibrating a processing chamber for semiconductor manufacturing process, comprising:
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performing a first predetermined process in a processing chamber; collecting a first set of signals transmitted from a first group of sensors disposed in the processing chamber to a controller while performing the predetermined process; analyzing the collected first set of signals; comparing the collected first set of signals with database stored in the controller to check sensor responses from the first group of sensors; calibrating sensors based on the collected first set of signals when a mismatch sensor response is found; subsequently performing a first series of processes in the processing chamber; and collecting a second set of signals transmitted from the sensors to the controller while performing the series of processes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A computer-readable storage medium storing a program, which, when executed by a processor performs an operation for operating a processing chamber, the operation comprising:
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performing a first hardware calibration process by calibrating sensors in a processing chamber based on sensor responses collected and analyzed from operating a first predetermined process in the processing chamber; and performing a second hardware calibration process by calibrating the sensors in the processing chamber based on sensor responses collected and analyzed from operating a first set of processes in the processing chamber. - View Dependent Claims (14, 15, 16, 17)
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18. A processing system, comprising:
a controller coupled to a processing chamber, the controller comprising a system memory containing instructions and a processor, the processor configured to cause the processing chamber to perform a method when executing the instructions, the method comprising; receiving a first set of signals transmitted from a processing chamber when performing a first predetermined process in the processing chamber; analyzing the collected first set of signals; comparing the collected first set of signals with database stored in the controller to check sensor responses from the first group of sensors; calibrating sensors based on the collected first set of signals when a mismatch sensor response is found; subsequently performing a first series of processes in the processing chamber; and collecting a second set of signals transmitted from the sensors to the controller while performing the series of processes. - View Dependent Claims (19, 20)
Specification