Evaporation Mask and Evaporation Device

• US 20170104186A1
• Filed: 10/12/2016
• Published: 04/13/2017
• Est. Priority Date: 10/13/2015
• Status: Active Grant

• Current Assignee: BOE Technology Group Co., Ltd.
• Original Assignee: BOE Technology Group Co., Ltd.
• Inventors: Li, Xiaohu, Sun, Zhongyuan
• Granted Patent: US 10,640,861 B2
• Time in Patent Office: Days
• CPC Class Codes: C23C 14/042 using masks
• CPC Class Codes: C23C 14/044 using masks to redistribute rather than totally prevent coating, e.g. producing thickness gradient
• CPC Class Codes: H10K 71/00 Manufacture or treatment specially adapted for the organic devices covered by this subclass
• CPC Class Codes: H10K 71/164 using vacuum deposition
• CPC Class Codes: H10K 71/166 using selective deposition, e.g. using a mask

Abstract

An evaporation mask includes: shielding regions and evaporation regions arranged alternately, and a baffle at least covering the evaporation regions. The shielding regions are provided with shielding parts, and the baffle includes a plurality of evaporation sub-regions, and a plurality of openings are provided in each evaporation sub-region; the plurality of evaporation sub-regions include at least one first evaporation sub-region, and compared to rest evaporation sub-regions, a sum of areas of all openings in a unit area of the first evaporation sub-region is minimum; and the closer an evaporation sub-region to the first evaporation sub-region, the less a sum of areas of all openings in a unit area of the evaporation sub-region.

Claims

1. An evaporation mask, comprising:

shielding regions and evaporation regions arranged alternately, wherein the shielding regions are provided with shielding parts, and

a baffle at least covering the evaporation regions;

wherein the baffle includes a plurality of evaporation sub-regions, and a plurality of openings are provided in each evaporation sub-region;

the plurality of evaporation sub-regions include at least one first evaporation sub-region, and compared to rest evaporation sub-regions, a sum of areas of all openings in a unit area of the first evaporation sub-region is minimum; and

the closer an evaporation sub-region to the first evaporation sub-region, the less a sum of areas of all openings in a unit area of the evaporation sub-region.

2. The evaporation mask according to claim 1, wherein the first evaporation sub-region is circular and is located at a center position of the evaporation regions;

the rest evaporation sub-regions are annular and concentric with the first evaporation sub-region, and surround the first evaporation sub-region;

areas of the annular evaporation sub-regions sequentially farther away from the first evaporation sub-region sequentially increase.

3. The evaporation mask according to claim 1, wherein the baffle is fixed to the shielding part through supports, so that there is a gap between the baffle and the shielding part.

4. The evaporation mask according to claim 3, wherein a height of the supports is in a range from 15 cm to 30 cm.

5. The evaporation mask according to claim 1, wherein an aperture of the openings in the first evaporation sub-region is in a range from 4.5 mm to 6.5 mm.

6. The evaporation mask according to claim 1, wherein an aperture of the openings in the rest evaporation sub-regions except the first evaporation sub-region is in a range from 9.5 mm to 10.5 mm.

7. The evaporation mask according to claim 1, wherein a thickness of the baffle is in a range from 1.5 mm to 3.5 mm.

8. The evaporation mask according to claim 1, wherein, a material forming the baffle is a resin material or a metal material, and a tolerable temperature of the resin material or the metal material is greater than or equal to 200°

C.

9. An evaporation device, comprising the evaporation mask according to claim 1.

10. The evaporating device according to claim 9, further comprising an evaporation source, and compared to the shielding part, the baffle is closer to the evaporation source.