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MASK EXTENSION WELDING DEVICE FOR THIN FILM DEPOSITION

  • US 20170106472A1
  • Filed: 04/14/2016
  • Published: 04/20/2017
  • Est. Priority Date: 10/16/2015
  • Status: Active Grant
First Claim
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1. A mask extension welding apparatus for thin film deposition to extend and weld a mask on a frame, comprising:

  • an extension unit configured to extend the mask in a first direction;

    a pressure unit configured to press the mask towards the frame, the pressure unit comprising;

    an upper housing;

    a lower housing spaced apart from the upper housing with respect to a fluid inlet; and

    a porous plate disposed at a downstream of the fluid inlet, the porous plate connecting the upper housing and the lower housing, and configured to eject a fluid supplied through the fluid inlet towards the mask; and

    a laser welding unit configured to weld the mask and the frame.

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