MICROELECTROMECHANICAL SYSTEM AND FABRICATING PROCESS

• US 20170107098A1
• Filed: 09/22/2016
• Published: 04/20/2017
• Est. Priority Date: 10/16/2015
• Status: Active Grant

• Current Assignee: Thales SA
• Original Assignee: Thales SA
• Inventors: LEFORT, Pierre-Olivier, QUER, Rgis, FILHOL, Fabien, LEVERRIER, Bertrand, CHAUMET, Bernard
• Granted Patent: US 9,731,958 B2
• Time in Patent Office: Days
• CPC Class Codes: B81B 2203/0307 Anchors
• CPC Class Codes: B81B 7/0016 Protection against shocks or vibrations, e.g. vibration damping
• CPC Class Codes: B81B 7/0048 between the MEMS die and the substrate
• CPC Class Codes: B81B 7/0051 between the package lid and the substrate
• CPC Class Codes: B81C 1/00269 Bonding of solid lids or wafers to the substrate
• CPC Class Codes: B81C 2201/019 Bonding or gluing multiple substrate layers
• CPC Class Codes: B81C 3/001 Bonding of two components
• CPC Class Codes: H01L 23/10 characterised by the material or arrangement of seals between parts, e.g. between cap and base of the container or between leads and walls of the container

Abstract

A microelectromechanical system comprising an assembly of layers stacked in a stacking direction comprises an active layer made of single-crystal silicon comprising an active structure, and first and second covers defining a cavity around the active structure, the active layer interposed between the first and second covers, the second cover comprising a single layer made of single-crystal silicon. The assembly comprises a decoupling layer made of single-crystal silicon and comprising: an attaching element fastened to a carrier, a frame encircling the attaching element in the plane of the decoupling layer, and a mechanical decoupling structure connecting the frame and the attaching structure, the mechanical decoupling structure allowing the attaching element to be flexibly joined to the frame. The frame is secured to the silicon layer of the second cover and at most one film of silicon dioxide is interposed between the frame and silicon layer of the second cover.

Claims

1. A microelectromechanical system comprising an assembly of a plurality of layers stacked in a stacking direction comprising:

an active layer made of single-crystal silicon, said active layer comprising an active structure, and

a first cover and a second cover defining a cavity around the active structure, the active layer being interposed between the first cover and the second cover, the second cover comprising a single layer made of single-crystal silicon,

wherein the assembly further comprises a decoupling layer made of single-crystal silicon and comprising;

an attaching element intended to be fastened to a carrier,

a frame encircling the attaching element in the plane of the decoupling layer, and

a mechanical decoupling structure connecting the frame and the attaching structure, the mechanical decoupling structure allowing the attaching element to be flexibly joined to the frame,

wherein the frame is secured to the silicon layer of the second cover and wherein at most one film of a material is interposed between said frame and said silicon layer of the second cover, the material being silicon dioxide.

2. The microelectromechanical system according to claim 1, wherein the decoupling layer and the second cover are assembled by direct bonding.

3. The microelectromechanical system according to claim 1, wherein the shape of the active structure in a plane perpendicular to the stacking direction has at least one symmetry element and wherein the mechanical decoupling structure has said at least one symmetry element.

4. The microelectromechanical system according to claim 1, wherein the attaching element and the decoupling structure have planes of symmetry parallel to the stacking direction, these planes of symmetry intersecting along a straight line that is parallel to the stacking direction and on which is located the centre of gravity of that portion of the microelectromechanical system which is connected to the attaching element by the decoupling structure.

5. The microelectromechanical system according to claim 1, wherein the mechanical decoupling structure comprises:

at least one first decoupling element designed to permit a movement of the attaching element with respect to the frame in a first direction of the plane of the decoupling layer but to prevent any significant movement of the attaching element with respect to the frame in a second direction of the plane of the decoupling layer perpendicular to the first direction, and

at least one second decoupling element designed to permit a movement of the attaching element with respect to the frame in a third direction of the plane of the decoupling layer but to prevent any significant movement of the attaching element with respect to the frame in a fourth direction of the plane of the decoupling layer perpendicular to the third direction, the third direction being distinct from the first direction.

6. The microelectromechanical system according to claim 5, wherein the first direction and the third direction are orthogonal.

7. The microelectromechanical system according to claim 6, wherein the mechanical decoupling structure comprises two first decoupling elements, which are placed on either side of the attaching element in the first direction, and two second decoupling elements, which are placed on either side of the attaching element in the third direction.

8. The microelectromechanical system according to claim 5, wherein the first and second decoupling elements are flexure arms.

9. The microelectromechanical system according to claim 8, wherein the central attaching element is bounded by a polygon having a plurality of sides, the decoupling structure comprising joining elements joining the frame and the respective sides of the polygon, each joining element comprising at least one of said joining arms extending parallel to said side of the polygon.

10. The microelectromechanical system according to claim 9, wherein the polygon has more than four sides.

11. An electromechanical device comprising the microelectromechanical system according to claim 1 and a carrier, the decoupling layer being fastened to said carrier only via said attaching element.

12. The electromechanical device according to claim 11, wherein a single continuous surface of the attaching element is fastened to said carrier.

13. A process for fabricating a microelectromechanical system according to claim 1, said process comprising a step of forming the assembly comprising a stacking and assembling step in which the decoupling layer and the silicon layer of the second cover are stacked and assembled so that at most one film of a material is interposed between the decoupling layer and said silicon layer of the second cover, the material being silicon dioxide.

14. The fabricating process according to claim 13, wherein the decoupling layer and the silicon layer of the second cover are assembled by direct bonding.

15. The fabricating process according to claim 13, comprising a step of forming the assembly of the plurality of layers on the wafer scale, allowing an assembly taking the form of a wafer integrating a plurality of microelectromechanical systems to be obtained, and a separating step consisting in dicing the wafer so as to singulate the microelectromechanical systems.