SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
First Claim
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1. A semiconductor device, comprising:
- a gate spacer on a substrate, the gate spacer defining a trench;
a gate electrode filling the trench; and
an interlayer insulating layer on the substrate, the interlayer insulating layer surrounding the gate spacer, the interlayer insulating layer including a first portion having germanium.
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Abstract
A semiconductor device capable of adjusting profiles of a gate electrode and a gate spacer by implanting or doping an element semiconductor material into an interlayer insulating layer may be provided. The semiconductor device may include a gate spacer on a substrate, the gate spacer defining a trench, a gate electrode filling the trench, and an interlayer insulating layer on the substrate, which surrounds the gate spacer, and at least a portion of which includes germanium.
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Citations
44 Claims
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1. A semiconductor device, comprising:
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a gate spacer on a substrate, the gate spacer defining a trench; a gate electrode filling the trench; and an interlayer insulating layer on the substrate, the interlayer insulating layer surrounding the gate spacer, the interlayer insulating layer including a first portion having germanium. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10-33. -33. (canceled)
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34. A semiconductor device, comprising:
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a first gate electrode on a substrate; a second gate electrode on the substrate, the second gate electrode adjacent to and spaced apart from the first gate electrode; a pair of first gate spacers at respective sides of the first gate electrode; a pair of second gate spacers at respective sides of the second gate electrode; a first interlayer insulating layer on the substrate, the first interlayer insulating layer between one of the pair of first gate spacers and one of the pair of second gate spacers opposing the one of the pair of first gate spacers, a first portion of the first interlayer insulating layer including an oxidized element semiconductor material. - View Dependent Claims (35, 36, 37, 38, 39, 40, 41, 42, 43, 44)
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Specification