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Physical Quantity Sensor, Electronic Apparatus, and Moving Object

  • US 20170115116A1
  • Filed: 09/29/2016
  • Published: 04/27/2017
  • Est. Priority Date: 10/21/2015
  • Status: Active Grant
First Claim
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1. A physical quantity sensor comprising:

  • a base;

    a circuit element disposed on the base;

    a first physical quantity sensor element disposed over at least one of the base and the circuit element, and driven to vibrate;

    a second physical quantity sensor element disposed over at least one of the base and the circuit element; and

    a stress buffer layer interpose between at least one of the first physical quantity sensor element and the second physical quantity sensor element and at least one of the base and the circuit element.

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