Systems for Removing and Replacing Consumable Parts from a Semiconductor Process Module in Situ

• US 20170115657A1
• Filed: 10/22/2015
• Published: 04/27/2017
• Est. Priority Date: 10/22/2015
• Status: Abandoned Application

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Daugherty, John, Paterson, Alex, Trussell, David D., Miller, Alan J.
• Application Number:
  US14/920,090
• Publication Number:
  US 20170115657A1
• Time in Patent Office: Days
• CPC Class Codes: G05B 19/418 Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
• CPC Class Codes: G05B 19/41875 characterised by quality surveillance of production
• CPC Class Codes: G05B 2219/32212 If parameter out of tolerance reject product
• CPC Class Codes: G05B 2219/45031 Manufacturing semiconductor wafers
• CPC Class Codes: G05B 2219/50291 Multi-tool, several tools
• CPC Class Codes: H01L 21/67167 surrounding a central transfer chamber
• CPC Class Codes: H01L 21/6719 characterized by the construction of the processing chambers, e.g. modular processing chambers
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

A cluster tool assembly includes a vacuum transfer module, a process module having a first side connected to the vacuum transfer module. An isolation valve having a first side and a second side, the first side of the isolation valve coupled to a second side of the process module. A replacement station is coupled to the second side of the isolation valve. The replacement station includes an exchange handler and a part buffer. The part buffer includes a plurality of compartments to hold new or used consumable parts. The process module includes a lift mechanism to enable placement of a consumable part installed in the process module to a raised position. The raised position provides access to the exchange handler to enable removal of the consumable part from the process module and store in a compartment of the part buffer. The exchange handler of the replacement station is configured to provide a replacement for the consumable part from the part buffer back to the process module. The lift mechanism is configured to receive the consumable part provided for replacement by the exchange handler and lower the consumable part to an installed position. The replacement by the exchange handler and the process module is conducted while the process module and the replacement station are maintained in a vacuum state.

Claims

1. A cluster tool assembly, comprising:

a vacuum transfer module;

a process module having a first side connected to the vacuum transfer module;

an isolation valve having a first side coupled to a second side of the process module; and

a replacement station coupled to a second side of the isolation valve, the replacement station including an exchange handler and a part buffer, the part buffer includes a plurality of compartments for holding new or used consumable parts;

the process module having a lift mechanism to enable placement of a consumable part installed in the process module to a raised position, the raised position providing access to the exchange handler to enable removal of the consumable part from the process module and storage to a compartment of the part buffer,

the exchange handler of the replacement station enabled to install a replacement for the consumable part from the part buffer back to the process module;

wherein the lift mechanism is configured to receive the consumable part provided for replacement by the exchange handler and lower the consumable part to an installed position;

wherein the replacement by the exchange handler and the process module is conducted while the process module and the replacement station are maintained in a vacuum state.

2. The cluster tool assembly of claim 1, wherein the isolation valve, the replacement station and the process module are interfaced with a controller, the controller including transfer logic and a vacuum state control for coordinating access between the replacement station and the process module while the process module remains in the vacuum state.

3. The cluster tool assembly of claim 2, wherein the controller includes a transfer logic and a vacuum state control for coordinating access between the replacement station and the process module while the process module remains in the vacuum state.

4. The cluster tool assembly of claim 2, wherein the replacement station includes a vacuum control coupled to a pump, the vacuum control interfaces with the controller to coordinate action of the pump to maintain the replacement station in the vacuum state during replacement of the consumable part.

5. The cluster tool assembly of claim 1, wherein the process module maintained in the vacuum state enables a reduced reconditioning of the process module before the process module returns to active operation following the replacement of the consumable part.

6. The cluster tool assembly of claim 1,

wherein the consumable part is an edge ring that is configured to surround a substrate when disposed over an electrostatic chuck of the process module;

wherein the lift mechanism includes a plurality of lift pins and actuators that enable placement of the edge ring installed in the process module to the raised position;

an actuator drive connected to the actuators; and

a controller interfaced with the actuator drive and the replacement station to enable coordination of replacement of the edge ring.

7. The cluster tool assembly of claim 6, wherein the actuators are connected to a power source, the power source used to supply power to the consumable part through the lift pins, wherein the power supplied is used to provide heat to the consumable part.

8. The cluster tool assembly of claim 7, wherein the actuators and the lift pins are made of a conductive material, the lift pins are connected to a switch so as to allow the lift pins to supply different power to the consumable part.

9. The cluster tool assembly of claim 6, wherein the actuator drive is connected to an air compressor to allow the actuators to operate the lift pins pneumatically.

10. The cluster tool assembly of claim 1, wherein the replacement station is a moveable unit that is coupled to the second side of the isolation valve when the consumable part is to be replaced and de-coupled when replacement of the consumable part is completed.

11. The cluster tool assembly of claim 1, wherein an opening defined in the second side of the process module and an opening on a side of the replacement station that are coupled to the isolation valve are sized to allow the consumable part to be moved into and out of the process module.

12. The cluster tool assembly of claim 11, wherein the consumable part is a segmented consumable part having two or more segments that are sized to fit through the openings in the replacement station and the process module.

13. The cluster tool assembly of claim 1, wherein the exchange handler includes an end effector that is designed to retrieve, pick, lift, support, hold, move, or rotate the consumable part in any plane.

14. The cluster tool assembly of claim 1, wherein the exchange handler is designed to retrieve different consumable parts from the process module, the exchange handler having a different end effector for retrieving different types of consumable parts.

15. A cluster tool assembly, comprising:

a vacuum transfer module having a first side and a second side, the vacuum transfer module including a robot;

a first isolation valve with a first side and a second side, the first side of the first isolation valve coupled to the first side of the vacuum transfer module;

a replacement station coupled to the second side of the first isolation valve, the replacement station having a part buffer, the part buffer includes a plurality of compartments for holding new or used consumable parts;

a second isolation valve with a first side and a second side, the second side of the second isolation valve coupled to the second side of the vacuum transfer module; and

a process module coupled to the first side of the second isolation valve;

the process module having a lift mechanism to enable movement of a consumable part installed in the process module to a raised position, the raised position providing access to the robot of the vacuum transfer module to enable removal of the consumable part from the process module and store in the part buffer of the replacement station,

the robot of the vacuum transfer module enabled to install a replacement for the consumable part from the part buffer into the process module,

wherein the lift mechanism is configured to receive the consumable part provided for replacement by the robot and lower the consumable part to an installed position,

wherein the replacement by the robot and the lift mechanism of the process module is conducted while the replacement station, the vacuum transfer module and the process module are maintained in a vacuum state.

16. The cluster tool assembly of claim 15, wherein the first isolation valve, the second isolation valve, the vacuum transfer module, the process module and the replacement station are interfaced with a controller, the controller including transfer logic and a vacuum state control for coordinating access between the replacement station, vacuum transfer module and the process module while the process module, the replacement station and the vacuum transfer module remains in the vacuum state.

17. The cluster tool assembly of claim 15, wherein the vacuum transfer module, the process module and the replacement station are interfaced with a controller, the controller includes a transfer logic and a vacuum state control for coordinating access between the replacement station and the vacuum transfer module and between the vacuum transfer module and the process module, while the vacuum transfer module, the replacement station and the process module remain in the vacuum state.

18. The cluster tool assembly of claim 16, wherein the replacement station includes a vacuum control coupled to a pump, the vacuum control interfaces with the controller to coordinate action of the pump to maintain the replacement station in the vacuum state during replacement of the consumable part.

19. The cluster tool assembly of claim 15, wherein the replacement station, the vacuum transfer module and the process module maintained in the vacuum state enables a reduced reconditioning of the process module before the process module returns to active operation following the replacement of the consumable part.

20. The cluster tool assembly of claim 15,

wherein the lift mechanism includes a plurality of lift pins and actuators that enable placement of the consumable part installed in the process module to the raised position;

an actuator drive connected to the actuators; and

a controller interfaced with the actuator drive, the replacement station and the vacuum transfer module to enable coordination of replacement of the consumable part.

21. The cluster tool assembly of claim 15, wherein the robot includes an end effector that is designed to retrieve, pick, lift, support, hold, move, or rotate the consumable part in any plane.

22. The cluster tool assembly of claim 21, wherein the robot includes a second end effector designed to move a semiconductor wafer into and out of the process module.

23. The cluster tool assembly of claim 15, wherein openings are defined in the first side and the second side of the vacuum transfer module for coupling the replacement station and the process module so as to maintain uniformity and symmetry in the cluster tool assembly.

24. A cluster tool assembly, comprising:

an atmospheric transfer module having a first side and a second side, the atmospheric transfer module having a robot;

a vacuum transfer module having a first side and a second side, the vacuum transfer module including a second robot;

a loadlock chamber coupled to the first side of the atmospheric transfer module and a first side of the vacuum transfer module, the loadlock chamber providing an interface between the atmospheric transfer module and the vacuum transfer module;

a process module coupled to the second side of the vacuum transfer module; and

a replacement station coupled to the second side of the atmospheric transfer module, the replacement station having a part buffer, the part buffer includes a plurality of compartments for holding new or used consumable parts;

the process module having a lift mechanism to enable movement of a consumable part installed in the process module to a raised position, the raised position providing access to the second robot of the vacuum transfer module to enable removal of the consumable part from the process module and transfer to the loadlock chamber, the robot of the atmospheric transfer module enabled to move the consumable part from the loadlock chamber to the part buffer of the replacement station,

the robot of the atmospheric transfer module and the second robot of the vacuum transfer module enabled to move a replacement for the consumable part from the part buffer into the process module,

wherein the lift mechanism is configured to receive the consumable part provided for replacement by the second robot and lower the consumable part to an installed position,

wherein the replacement by the second robot and the lift mechanism of the process module is conducted while the vacuum transfer module and the process module are maintained in a vacuum state.

25. The cluster tool assembly of claim 24, wherein the atmospheric transfer module, the vacuum transfer module, the process module, and the replacement station are interfaced with a controller, the controller including transfer logic and a vacuum state control for coordinating access between the replacement station, the atmospheric transfer module, the vacuum transfer module, and the process module while the process module and the vacuum transfer module remains in the vacuum state.

26. The cluster tool assembly of claim 24, wherein the atmospheric transfer module and the replacement station are maintained at atmospheric condition.