CONFORMAL DOPING FOR PUNCH THROUGH STOPPER IN FIN FIELD EFFECT TRANSISTOR DEVICES
First Claim
1. A method of forming a semiconductor device comprising:
- forming a spacer of a dielectric material on sidewalls of fin structures;
exposing a portion of the fin structures underlying the spacer of the dielectric material; and
doping the exposed portion of the fin structures underlying the spacer with a dopant having a first conductivity type to form a punch through stop region.
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Accused Products
Abstract
A method of forming a punch through stop region that includes forming isolation regions of a first dielectric material between adjacent fin structures and forming a spacer of a second dielectric material on sidewalls of the fin structure. The first dielectric material of the isolation region may be recessed with an etch process that is selective to the second dielectric material to expose a base sidewall portion of the fin structures. Gas phase doping may introduce a first conductivity type dopant to the base sidewall portion of the fin structure forming a punch through stop region underlying a channel region of the fin structures.
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Citations
20 Claims
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1. A method of forming a semiconductor device comprising:
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forming a spacer of a dielectric material on sidewalls of fin structures; exposing a portion of the fin structures underlying the spacer of the dielectric material; and doping the exposed portion of the fin structures underlying the spacer with a dopant having a first conductivity type to form a punch through stop region. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method of forming a semiconductor device comprising:
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forming a spacer of a dielectric material on sidewalls of fin structures. exposing a portion of the fin structures underlying the spacer of the dielectric material; doping the exposed portion of the fin structures underlying the spacer with a dopant having a first conductivity type to form a punch through stop region; removing the spacer; and forming source and drain regions on the source and drain region portions of the fin structure, the source and drain regions doped with a second conductivity type dopant. - View Dependent Claims (11, 12, 13, 14, 15, 16)
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17. A semiconductor device comprising;
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a punch through stop region of a first conductivity type dopant that is present in a base portion of a fin structure that is underlying a channel portion of the fin structure; and source and drain regions of a second conductivity type that are present on the source and drain region portions of the fin structure, the channel portion of the fin structure being substantially free of the first conductivity type dopant that provides the punch through stop region. - View Dependent Claims (18, 19, 20)
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Specification