PROBE HEAD RECEIVER AND PROBE CARD ASSEMBLY HAVING THE SAME

• US 20170122984A1
• Filed: 10/29/2015
• Published: 05/04/2017
• Est. Priority Date: 10/29/2015
• Status: Active Grant

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: HSU, MING-CHENG
• Granted Patent: US 10,866,266 B2
• Time in Patent Office: Days
• CPC Class Codes: G01R 1/07314 the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support on an elastic support, e.g. a film, G01R1/0735
• CPC Class Codes: G01R 1/07371 using an intermediate card or back card with apertures through which the probes pass

Abstract

The present disclosure relates to a probe head receiver, which includes: a first template, a guide plate and a spacer. The first template has a number of apertures of a first size. The guide plate has a number of apertures of a second size, each of the number of apertures of the first template is aligned with each of the number of apertures of the guide plate. The spacer is between the first template and the guide place. The second size is different from the first size.

Claims

1. A probe head receiver, comprising:

a first template having a number of apertures of a first size;

a guide plate having a number of apertures of a second size, each of the number of apertures of the first template being aligned with each of the number of apertures of the guide plate; and

a spacer between the first template and the guide place,

wherein the second size is different from the first size.

2. The probe head receiver of claim 1, wherein the second size is greater than the first size.

3. The probe head receiver of claim 1, wherein the guide plate is under the spacer.

4. The probe head receiver of claim 3, further comprising a second template under the guide plate.

5. The probe head receiver of claim 1, wherein the guide plate is over the spacer.

6. The probe head receiver of claim 5, further comprising a second template over the guide plate.

7. The probe head receiver of claim 1, wherein a width of each of the number of apertures of the guide plate is tapering downward.

8. The probe head receiver of claim 1, wherein each of the number of apertures of the guide plate has a first width on a top surface of the guide plate and a second width on a bottom surface of guide plate, wherein the first width is greater than the second width.

9. The probe head receiver of claim 8, wherein each of the number of apertures of the first template has a third width on a top surface of the first template and a fourth width on a bottom surface of first template, wherein the third width is substantially the same as the fourth width, and the second width is substantially the same as the third width.

10. The probe head receiver of claim 8, wherein the first width is greater than the second width by approximately 15 micrometers.

11. The probe head receiver of claim 1, wherein the guide plate comprises one of ceramic, FR4 or polyimide.

12. A probe head receiver, comprising:

a guide plate having a number of sidewalls to direct an object from a first direction to a second direction different from the first direction, each of the number of sidewalls defining an aperture;

a first template having a number of apertures, each of the number of apertures of the first template being aligned with each of the number of apertures of the guide plate;

a spacer between the first template and the guide place.

13. The probe head receiver of claim 12, wherein the guide plate is under the spacer.

14. The probe head receiver of claim 13, further comprising a second template under the guide plate.

15. The probe head receiver of claim 12, wherein the guide plate is over the spacer.

16. The probe head receiver of claim 15, further comprising a second template over the guide plate.

17. The probe head receiver of claim 12, wherein the guide plate comprises one of ceramic, FR4 or polyimide.

18. A probe card assembly, comprising:

a probe head receiver comprising;

a first template having a number of apertures;

a guide plate having a top surface and a bottom surface and a number of funnel-shape apertures formed therein and extending from the top surface to the bottom surface; and

a spacer between the first template and the guide place, and

a number of probe pins, each the number of probe pins passing through each of the number of apertures of the first template and through each of the number of funnel-shape apertures.

19. The probe card assembly of claim 18, wherein each of the number of funnel-shape apertures has a first width on the top surface of the guide plate and a second width on the bottom surface of the guide plate, wherein the first width is different from the second width.

20. The probe card assembly of claim 18, wherein the first width is greater than the second width.