DEPOSITION MASK ASSEMBLY AND METHOD OF MANUFACTURING DISPLAY DEVICE USING THE SAME

• US 20170125680A1
• Filed: 06/07/2016
• Published: 05/04/2017
• Est. Priority Date: 11/02/2015
• Status: Active Grant

• Current Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Original Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Inventors: LEE, Su Hwan, KIM, Eun Ho
• Granted Patent: US 10,128,440 B2
• Time in Patent Office: Days
• CPC Class Codes: C23C 14/00 Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
• CPC Class Codes: C23C 14/042 using masks
• CPC Class Codes: H10K 50/84 Passivation; Containers; Encapsulations
• CPC Class Codes: H10K 71/00 Manufacture or treatment specially adapted for the organic devices covered by this subclass
• CPC Class Codes: H10K 71/166 using selective deposition, e.g. using a mask
• CPC Class Codes: H10K 71/191 characterised by provisions for the orientation or alignment of the layer to be deposited

Abstract

A deposition mask assembly includes a frame including a first opening portion and a second opening portion spaced apart from each other in a first direction, a first split mask group including a plurality of first split masks arranged on the first opening portion in a second direction crossing the first direction, and a second split mask group including a plurality of second split masks arranged on the second opening portion in the second direction, wherein a boundary between adjacent first split masks in the second direction and a boundary between adjacent second split masks in the second direction are at different positions.

Claims

1. A deposition mask assembly, comprising:

a frame including a first opening portion and a second opening portion spaced apart from each other in a first direction;

a first split mask group including a plurality of first split masks arranged on the first opening portion in a second direction crossing the first direction; and

a second split mask group including a plurality of second split masks arranged on the second opening portion in the second direction,

wherein a boundary between adjacent first split masks in the second direction and a boundary between adjacent second split masks in the second direction are at different positions.

2. The deposition mask assembly as claimed in claim 1, wherein outermost edges of the first split masks disposed at outermost sides of the first split mask group and outermost edges of the second split masks disposed at outermost sides of the second split mask group are at same positions in the second direction.

3. The deposition mask assembly as claimed in claim 1, wherein a first split mask of the plurality of first split masks at an outermost side of the first split mask group, and a second split mask of the plurality of second split masks at an outermost side of the second split mask group have different widths from each other in the second direction, and face each other in the first direction.

4. The deposition mask assembly as claimed in claim 3, wherein each of the first split masks at the outermost sides of the first split mask group has a first width in the second direction, each of the first split masks, other than the first split masks at the outermost sides of the first split mask group, has a second width larger than the first width in the second direction, and each of the second split masks of the second split mask group has a third width equal to the second width.

5. The deposition mask assembly as claimed in claim 3, wherein each of the second split masks at the outermost sides of the second split mask group has a first width in the second direction, each of the second split masks, other than the second split masks disposed at the outermost sides of the second split mask group, has a second width larger than the first width in the second direction, and each of the first split masks of the first split mask group has a third width equal to the second width.

6. The deposition mask assembly as claimed in claim 3, wherein:

the first split mask at the outermost side of the first split mask group and a second split mask at an opposite outermost side of the second split mask group have a first width in the second direction,

each of the plurality of first split masks, other than the first split mask at the outermost side of the first split mask group, has a second width larger than the first width in the second direction, and

each of the plurality of the second split masks, other than the second split mask at the opposite outermost side of the second split mask group, has the second width in the second direction.

7. The deposition mask assembly as claimed in claim 1, wherein:

each of the first split masks includes welded portions at opposite edges thereof in the first direction,

each of the second split masks includes welded portions at opposite edges thereof in the first direction, and

welded portions of the first split mask and welded portion of the second split mask, which face each other, partially overlap each other in the first direction.

8. The deposition mask assembly as claimed in claim 7, wherein:

the frame includes a reinforcing support defining the first opening portion and the second opening portion, the reinforcing support extending in the second direction, and

the welded portions of the first split masks and the welded portions of the second split masks face each other on the reinforcing support.

9. A method of manufacturing a display device, the method comprising:

disposing a deposition mask assembly on a deposition source, the deposition mask assembly including;

a frame including a first opening portion and a second opening portion spaced apart from each other in a first direction,

a first split mask group including a plurality of first split masks arranged on the first opening portion in a second direction crossing the first direction, and

a second split mask group including a plurality of second split masks arranged on the second opening portion in the second direction,

wherein a boundary between adjacent first split masks in the second direction and a boundary between adjacent second split masks in the second direction are at different positions; and

moving a substrate over the deposition mask assembly in the first direction, while discharging a deposition material toward the substrate, such that the substrate sequentially passes through the first split mask group and the second split mask group using the deposition source to form a pattern layer on a portion of the substrate, the portion of the substrate passing through the first split mask group and the second split mask group.

10. The method as claimed in claim 9, wherein forming the pattern layer includes forming at least one of a hole transport layer and a light-emitting layer in a light-emitting display device.

11. The method as claimed in claim 9, wherein disposing the deposition mask assembly includes disposing the deposition mask assembly to be spaced apart from the substrate.

12. The method as claimed in claim 9, wherein moving the substrate over the deposition mask assembly includes using a deposition mask assembly having a shorter length than the substrate in the first direction.

13. The method as claimed in claim 9, wherein disposing the deposition mask assembly includes having outermost edges of the first split masks at outermost sides of the first split mask group and outermost edges of the second split masks at outermost sides of the second split mask group at same positions in the second direction.

14. The method as claimed in claim 9, wherein disposing the deposition mask assembly includes arranging a first split mask of the plurality of first split masks at an outermost side of the first split mask group and a second split mask of the plurality of second split masks at an outermost side of the second split mask group to have different widths from each other in the second direction, and face each other in the first direction.

15. The method as claimed in claim 14, wherein each of the first split masks at outermost sides of the first split mask group has a first width in the second direction, each of the first split masks, other than the first split masks at the outermost sides of the first split mask group, has a second width larger than the first width in the second direction, and each of the second split masks of the second split mask group has a third width equal to the second width.

16. The method as claimed in claim 14, wherein each of the second split masks at outermost sides of the second split mask group has a first width in the second direction, each of the second split masks, other than the second split masks at the outermost sides of the second split mask group, has a second width larger than the first width in the second direction, and each of the first split masks of the first split mask group has a third width equal to the second width.

17. The method as claimed in claim 14, wherein:

the first split mask at the outermost side of the first split mask group and a second split mask at an opposite outermost side of the second split mask group have a first width in the second direction,

each of the plurality of first split masks, other than the first split mask at the outermost side of the first split mask group, has a second width larger than the first width in the second direction, and

each of the plurality of the second split masks, other than the second split mask at the opposite outermost side of the second split mask group, has the second width in the second direction.

18. The method as claimed in claim 9, wherein:

each of the first split masks includes welded portions at opposite edges thereof in the first direction,

each of the second split masks includes welded portions at opposite edges thereof in the first direction, and

welded portions of the first split mask and welded portion of the second split mask, which face each other, partially overlap each other in the first direction.

19. The method as claimed in claim 18, wherein:

the frame includes a reinforcing support defining the first opening portion and the second opening portion, the reinforcing support extending in the second direction, and

the welded portions of the first split masks and the welded portions of the second split masks face each other on the reinforcing support.