MASK FRAME ASSEMBLY, DEVICE FOR DEPOSITION INCLUDING THE SAME, AND METHOD OF MANUFACTURING DISPLAY DEVICE

• US 20170133592A1
• Filed: 06/09/2016
• Published: 05/11/2017
• Est. Priority Date: 11/06/2015
• Status: Abandoned Application

• Current Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Original Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Inventors: BAEK, Deawon
• Application Number:
  US15/178,071
• Publication Number:
  US 20170133592A1
• Time in Patent Office: Days
• CPC Class Codes: C23C 14/042 using masks
• CPC Class Codes: H10K 50/11 characterised by the electroluminescent [EL] layers
• CPC Class Codes: H10K 59/12 Active-matrix OLED [AMOLED] displays
• CPC Class Codes: H10K 59/1201 Manufacture or treatment
• CPC Class Codes: H10K 71/00 Manufacture or treatment specially adapted for the organic devices covered by this subclass
• CPC Class Codes: H10K 71/166 using selective deposition, e.g. using a mask

Abstract

A mask frame assembly a frame including an opening, a mask including a pattern unit, the pattern unit including pattern holes through which a deposition material is configured to pass, and a support stick disposed between the mask and a vapor deposition source and crossing a portion of the opening, the support stick including an opening hole exposing at least a portion of the pattern unit, in which first and second ends of the mask are coupled to the frame, and at least a portion of the support stick is coupled to the mask.

Claims

1. A mask frame assembly, comprising:

a frame comprising an opening;

a mask comprising a pattern unit, the pattern unit comprising pattern holes through which a deposition material is configured to pass; and

a support stick disposed between the mask and a vapor deposition source and crossing a portion of the opening, the support stick comprising an opening hole exposing at least a portion of the pattern unit,

wherein;

first and second ends of the mask are coupled to the frame;

at least a portion of the support stick is coupled to the mask; and

the pattern unit and the opening hole have different shapes.

2. The mask frame assembly of claim 1, wherein the mask is disposed in plural along a long side of the frame.

3. The mask frame assembly of claim 1, wherein the opening hole has at least one of a circular shape, an oval shape, and a polygonal shape.

4. The mask frame assembly of claim 1, wherein the support stick is disposed in plural along a long side of the frame.

5. The mask frame assembly of claim 1, wherein the support stick is disposed in plural along a short side of the frame.

6. The mask frame assembly of claim 1, wherein the support stick is disposed in plural along long and short sides of the frame.

7. The mask frame assembly of claim 1, further comprising:

a first welding portion coupling the first and second ends of the mask to the frame.

8. The mask frame assembly of claim 1, further comprising:

a second welding portion coupling the support stick to the mask.

9. The mask frame assembly of claim 3, wherein:

the support stick is disposed in plural along a long side of the frame; and

opening holes of adjacent support sticks have different shapes from each other.

20. The mask frame assembly of claim 1, wherein a length of the mask is greater than a length of the support stick along a short side of the frame.

10. A deposition device, comprising:

a vapor deposition source configured to supply a deposition material to a substrate; and

a mask frame assembly disposed between the vapor deposition source and the substrate, the mask frame assembly configured to pass the deposition material therethrough, the mask frame assembly comprising;

a frame comprising an opening;

a mask comprising a pattern unit, the pattern unit comprising pattern holes through which the deposition material is configured to pass; and

a support stick disposed between the mask and the vapor deposition source and crossing a portion of the opening, the support stick comprising an opening hole exposing at least a portion of the pattern unit,

wherein;

first and second ends of the mask are coupled to the frame;

at least a part of the support stick is coupled to the mask; and

the pattern unit and the opening hole have different shapes.

11. The deposition device of claim 10, wherein the mask is disposed in plural along a long side of the frame.

12. The deposition device of claim 10, wherein the opening hole has at least one of a circular shape, an oval shape, and a polygonal shape.

13. The deposition device of claim 10, wherein the support stick is disposed in plural along a long side of the frame.

14. The deposition device of claim 10, wherein the support stick is disposed in plural along a short side of the frame.

15. The deposition device of claim 10, wherein the support stick is disposed in plural along long and short sides of the frame.

16. The deposition device of claim 10, further comprising:

a first welding portion coupling the first and second ends of the mask to the frame.

17. The deposition device of claim 10, further comprising:

a second welding portion coupling the support stick to the mask.

18. The deposition device of claim 12, wherein:

the support stick is disposed in plural along a long side of the frame; and

opening holes of adjacent support sticks have different shapes from each other.

19. A method of manufacturing a display device, the method comprising:

forming an organic layer or a first electrode on a substrate by using a mask frame assembly, the mask frame assembly comprising;

a frame comprising an opening;

a mask comprising a pattern unit, the pattern unit comprising pattern holes through which a deposition material is configured to pass; and

a support stick disposed between the mask and a vapor deposition source and crossing a portion of the opening, the support stick comprising an opening hole exposing at least a portion of the pattern unit,

wherein;

first and second ends of the mask are coupled to the frame;

at least a part of the support stick is coupled to the mask; and

the pattern unit and the opening hole have different shapes.