MEMS DEVICE WITH CAPACITANCE ENHANCEMENT ON QUADRATURE COMPENSATION ELECTRODE

• US 20170138734A1
• Filed: 11/16/2015
• Published: 05/18/2017
• Est. Priority Date: 11/16/2015
• Status: Abandoned Application

• Current Assignee: NXP USA, Inc. (NXP Semiconductors NV)
• Original Assignee: Freescale Semiconductor, Inc. (NXP Semiconductors NV)
• Inventors: SHAO, Peng
• Application Number:
  US14/942,506
• Publication Number:
  US 20170138734A1
• Time in Patent Office: Days
• CPC Class Codes: B81B 2201/0242 Gyroscopes
• CPC Class Codes: B81B 2201/025 Inertial sensors not provided for in B81B2201/0235 - B81B2201/0242
• CPC Class Codes: B81B 2203/04 Electrodes
• CPC Class Codes: B81B 2203/055 Translation in a plane parallel to the substrate, i.e. enabling movement along any direction in the plane
• CPC Class Codes: B81B 2207/03 Electronic circuits for micromechanical devices which are not application specific, e.g. for controlling, power supplying, testing, protecting
• CPC Class Codes: B81B 3/0056 Adjusting the distance between two elements, at least one of them being movable, e.g. air-gap tuning
• CPC Class Codes: B81B 3/0078 Constitution or structural means for improving mechanical properties not provided for in B81B3/007 - B81B3/0075
• CPC Class Codes: G01C 19/5712 the devices involving a micromechanical structure
• CPC Class Codes: G01C 19/5733 Structural details or topology

Abstract

A MEMS device includes a mass system capable of undergoing oscillatory drive motion along a drive axis and oscillatory sense motion along a sense axis perpendicular to the drive axis. A quadrature correction unit includes a fixed electrode and a movable electrode coupled to the movable mass system, each being lengthwise oriented along the drive axis. The movable electrode is spaced apart from the fixed electrode by a gap having an initial width. At least one of the fixed and movable electrodes includes an extrusion region extending toward the other of the fixed and movable electrodes. The movable electrode undergoes oscillatory motion with the mass system such that the extrusion region is periodically spaced apart from the other of the fixed and movable electrodes by a gap exhibiting a second width that is less than the first width thereby enabling capacitance enhancement between the electrodes.

Claims

1. A MEMS device for capacitance enhancement comprising:

a fixed electrode coupled to a substrate and lengthwise oriented in a first direction;

a movable electrode coupled to and extending from a movable mass system, said movable electrode being lengthwise oriented in said first direction, said movable electrode being spaced apart from said fixed electrode by a gap in a second direction that is perpendicular to said first direction; and

an extrusion region extending in said second direction from one of said fixed and movable electrodes toward the other of said fixed and movable electrodes.

2. The MEMS device of claim 1 wherein:

said gap between said fixed and movable electrodes is a first gap exhibiting a first width; and

said movable electrode is configured to undergo oscillatory motion with said mass system such that said extrusion region is periodically spaced apart from the other of said fixed and movable electrodes by a second gap exhibiting a second width, said second width being less than said first width.

3. The MEMS device of claim 2 wherein:

said first width is a minimum allowable spacing between said fixed and movable electrodes limited by a fabrication process used to form said fixed and movable electrodes; and

said second width is less than said minimum allowable spacing.

4. The MEMS device of claim 2 wherein when said movable electrode is not undergoing said oscillatory drive motion, said extrusion region is not positioned between said fixed and movable electrodes.

5. The MEMS device of claim 2 wherein said movable electrode moves a distance during a first half period of said oscillatory motion in accordance with an amplitude of said oscillatory motion, and said extrusion region exhibits a length in said first direction that is greater than said distance.

6. The MEMS device of claim 2 wherein said second width is approximately one half of said first width.

7. The MEMS device of claim 1 wherein said extrusion region is a first extrusion region extending from said fixed electrode toward said movable electrode, and said angular rate sensor further comprises a second extrusion region extending in said second direction from said movable electrode toward said fixed electrode.

8. The MEMS device of claim 7 wherein said movable electrode is configured to undergo said oscillatory motion with said movable mass system such that said first and second extrusion regions are periodically positioned between said fixed and movable electrodes.

9. The MEMS device of claim 8 wherein said first and extrusion regions are periodically positioned between said fixed and movable electrodes concurrently without contacting one another.

10. The MEMS device of claim 8 wherein:

said gap between said fixed and movable electrodes is a first gap exhibiting a first width; and

when said first and second extrusion regions are positioned between said fixed and movable electrodes, said first extrusion region is spaced apart from said movable electrode by a second gap and said second extrusion region is spaced apart from said fixed electrode by a third gap, each of said second and third gaps exhibiting a second width, said second width being less than said first width.

11. The MEMS device of claim 1 wherein said fixed electrode is a first fixed electrode, said movable electrode is a first movable electrode, said extrusion region is a first extrusion region, said gap is a first gap, said first fixed electrode extends from a first side of an anchor structure coupled to said substrate, and said MEMS device further comprises:

a second fixed electrode extending from a second side of said anchor structure and lengthwise oriented in said first direction, said second side opposing said first side;

a second movable electrode coupled to and extending from said movable mass system, said second movable electrode being lengthwise oriented in said first direction, said second movable electrode being spaced apart from said second fixed electrode in said second direction by said first gap, said first gap exhibiting a first width; and

a second extrusion region extending in said second direction from one of said second fixed and second movable electrodes toward the other of said second fixed and second movable electrodes, wherein said first and second movable electrodes are configured to undergo oscillatory drive motion in phase opposition such that said first extrusion region is periodically spaced apart from the other of said first fixed and said first movable electrodes by a second gap exhibiting a second width, and said second extrusion region is periodically spaced apart from the other of said second fixed and second movable electrodes by a third gap exhibiting said second width, said second width being less than said first width.

12. The MEMS device of claim 1 wherein:

said movable mass system is flexibly coupled to a substrate, said movable mass system being configured to undergo oscillatory drive motion relative to a drive axis that is substantially parallel to said first direction and said mass system being further configured to undergo oscillatory sense motion relative to a sense axis that is substantially parallel to said second direction in response to an angular velocity about an input axis that is perpendicular to each of said drive and sense axes; and

said MEMS device further comprises a control circuit in electrical communication with said fixed electrode, said control circuit determining a magnitude of quadrature motion of said mass system in said second direction along said sense axis from said oscillatory drive motion in said first direction, and applying a corrective voltage to said fixed electrode to compensate for said quadrature motion.

13. A MEMS device comprising:

a mass system flexibly coupled to a substrate, said mass system being configured to undergo oscillatory drive motion relative to a drive axis and said mass system being further configured to undergo oscillatory sense motion relative to a sense axis that is perpendicular to said drive axis in response to an angular velocity about an input axis that is perpendicular to each of said drive and sense axes; and

a quadrature correction unit including;

a fixed electrode coupled to said substrate and lengthwise oriented in a first direction that is substantially parallel to said drive axis;

a movable electrode coupled to and extending from said mass system, said movable electrode being lengthwise oriented in said first direction, said movable electrode being spaced apart from said fixed electrode in a second direction parallel to said sense axis by a first gap exhibiting a first width;

a first extrusion region extending in said second direction from said fixed electrode toward said movable electrode; and

a second extrusion region extending in said second direction from said movable electrode toward said fixed electrode, wherein said movable electrode is configured to undergo said oscillatory drive motion with said mass system such that said first extrusion region is periodically spaced apart from said movable electrode by a second gap exhibiting a second width, and said second extrusion region is periodically spaced apart from said fixed electrode by a third gap exhibiting said second width, said second width being less than said first width.

14. The angular rate sensor of claim 13 wherein:

said first width is a minimum allowable spacing between said fixed and movable electrodes limited by a fabrication process used to form said fixed and movable electrodes; and

said second width is less than said minimum allowable spacing.

15. The angular rate sensor of claim 13 wherein when said movable electrode is not undergoing said oscillatory drive motion, neither of said first and second extrusion regions are positioned between said fixed and movable electrodes.

16. The angular rate sensor of claim 13 wherein said movable electrode moves a distance during a first half period of said oscillatory drive motion in accordance with a drive amplitude of said oscillatory drive motion, and each of said first and second extrusion regions exhibits a length in said first direction that is greater than said distance.

17. The angular rate sensor of claim 13 wherein said first and extrusion regions are periodically positioned between said fixed and movable electrodes concurrently without contacting one another.

18. An angular rate sensor comprising:

a mass system flexibly coupled to a substrate, said mass system being configured to undergo oscillatory drive motion relative to a drive axis and said mass system being further configured to undergo oscillatory sense motion relative to a sense axis that is perpendicular to said drive axis in response to an angular velocity about an input axis that is perpendicular to each of said drive and sense axes; and

a quadrature correction unit including;

a fixed electrode coupled to said substrate and lengthwise oriented in a first direction that is substantially parallel to said drive axis;

a movable electrode coupled to and extending from said mass system, said movable electrode being lengthwise oriented in said first direction, said movable electrode being spaced apart from said fixed electrode in a second direction parallel to said sense axis by a first gap exhibiting a first width; and

an extrusion region extending in said second direction from one of said fixed and movable electrodes toward the other of said fixed and movable electrodes, wherein;

said extrusion region is not positioned between said movable electrodes when said mass system is not undergoing said oscillatory drive motion;

said movable electrode is configured to undergo said oscillatory drive motion with said mass system such that said extrusion region is periodically spaced apart from the other of said fixed and movable electrodes by a second gap exhibiting a second width, said second width being less than said first width;

said movable electrode moves a distance during a first half period of said oscillatory drive motion in accordance with a drive amplitude of said oscillatory drive motion; and

said extrusion region exhibits a length in said first direction that is greater than said distance.

19. The angular rate sensor of claim 18 wherein:

said first width is a minimum allowable spacing between said fixed and movable electrodes limited by a fabrication process used to form said fixed and movable electrodes; and

said second width is less than said minimum allowable spacing.

20. The angular rate sensor of claim 18 wherein said second width is approximately one half of said first width.