ADVANCED OPTICAL SENSOR AND METHOD FOR PLASMA CHAMBER
First Claim
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1. A method for detection of optical events in a plasma processing system, the method comprising:
- detecting at least one light emission signal in a plasma processing chamber, the at least one detected light emission signal including light emissions from an optical event;
processing the at least one light emission signal; and
detecting a signature of the optical event from the processed light emission signal.
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Abstract
An advanced optical sensor and method for detection of optical events in a plasma processing system. The method includes detecting at least one light emission signal in a plasma processing chamber. The at least one detected light emission signal including light emissions from an optical event. The method further includes processing the at least one light emission signal and detecting a signature of the optical event from the processed light emission signal.
29 Citations
20 Claims
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1. A method for detection of optical events in a plasma processing system, the method comprising:
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detecting at least one light emission signal in a plasma processing chamber, the at least one detected light emission signal including light emissions from an optical event; processing the at least one light emission signal; and detecting a signature of the optical event from the processed light emission signal. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. An apparatus for detection of optical events in a plasma processing system, comprising:
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a window disposed on a plasma processing chamber of the plasma processing system, for providing optical access to the plasma processing chamber; at least one optical detector for detecting light emission signal from an optical event in the plasma processing chamber via a light collector; and a controller configured to process the light emission signal based on an operation status of the plasma, and detect a signature of the optical event from the processed light emission signal.
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20. A system for plasma processing, comprising:
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a plasma processing chamber; at least one optical detector for detecting light emission signal from an optical event in the plasma processing chamber via a light collector; and a controller configured to process the light emission signal based on an operation status of the plasma, and detect a signature of the optical event from the processed light emission signal.
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Specification