MASK FRAME ASSEMBLY, DISPLAY MANUFACTURING APPARATUS INCLUDING MASK FRAME ASSEMBLY, AND METHOD OF MANUFACTURING DISPLAY APPARATUS USING MASK FRAME ASSEMBLY

• US 20170141313A1
• Filed: 06/01/2016
• Published: 05/18/2017
• Est. Priority Date: 11/13/2015
• Status: Active Grant

• Current Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Original Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Inventors: MIN, Soohyun
• Granted Patent: US 9,847,485 B2
• Time in Patent Office: Days
• CPC Class Codes: C23C 14/042 using masks
• CPC Class Codes: C23C 14/0641 Nitrides C23C14/0617 takes precedence
• CPC Class Codes: C23C 14/0676 Oxynitrides
• CPC Class Codes: C23C 14/08 Oxides C23C14/10 takes precedence
• CPC Class Codes: C23C 14/221 Ion beam deposition C23C14/46, C23C14/48 take precedence
• CPC Class Codes: C23C 14/24 Vacuum evaporation
• CPC Class Codes: C23C 14/34 Sputtering
• CPC Class Codes: H10K 2102/311 Flexible OLED
• CPC Class Codes: H10K 50/8445 multilayered coatings having a repetitive structure, e.g. having multiple organic-inorganic bilayers
• CPC Class Codes: H10K 59/12 Active-matrix OLED [AMOLED] displays
• CPC Class Codes: H10K 59/1201 Manufacture or treatment
• CPC Class Codes: H10K 59/8731 multilayered coatings having a repetitive structure, e.g. having multiple organic-inorganic bilayers
• CPC Class Codes: H10K 71/00 Manufacture or treatment specially adapted for the organic devices covered by this subclass
• CPC Class Codes: H10K 71/166 using selective deposition, e.g. using a mask

Abstract

A mask frame assembly includes a frame, a first support bar, split masks, and a second support bar. The frame includes an opening. The first support bar spans the opening in a first direction, the first support bar includes first ends disposed on the frame. The split masks span the opening in a second direction crossing the first direction, the split masks include first portions disposed on the first support bar and second ends disposed on the frame. The second support bar is disposed on the first support bar, the second support bar being more magnetic than the first support bar.

Claims

1. A mask frame assembly comprising:

a frame comprising an opening;

a first support bar spanning the opening in a first direction, the first support bar comprising first ends disposed on the frame;

split masks spanning the opening in a second direction crossing the first direction, the split masks comprising first portions disposed on the first support bar and second ends disposed on the frame; and

a second support bar disposed on the first support bar, the second support bar being more magnetic than the first support bar.

2. The mask frame assembly of claim 1, wherein the first support bar is disposed between the split masks and the second support bar.

3. The mask frame assembly of claim 1, wherein:

a thickness of the first support bar in a third direction perpendicular to the first direction and the second direction is greater than a thickness of the second support bar in the third direction; and

a width of the first support bar in the second direction is greater than a width of the second support bar in the second direction.

4. The mask frame assembly of claim 1, wherein:

the second support bar is one of a plurality of second support bars disposed on the first support bar; and

the plurality of second support bars are spaced apart from one another in the first direction.

5. The mask frame assembly of claim 1, wherein:

the first support bar comprises a groove; and

the second support bar is at least partially disposed in the groove.

6. The mask frame assembly of claim 1, wherein at least one dimension of the second support bar decreases with increasing distance from a central portion of the second support bar towards the second ends.

7. The mask frame assembly of claim 1, wherein:

the frame comprises first grooves disposed on second grooves;

the first ends interface with the first grooves; and

the second ends interface with the second grooves.

8. A display manufacturing apparatus comprising:

a mask frame assembly;

a supporter configured to support the mask frame assembly;

an electrostatic chuck configured to support a substrate in relation to the mask frame assembly; and

a vapor deposition source configured to eject a deposition material towards the substrate,

wherein the mask frame assembly comprises;

a frame comprising an opening;

a first support bar spanning the opening in a first direction, the first support bar comprising first ends disposed on the frame;

split masks spanning the opening in a second direction crossing the first direction, the split masks comprising first portions disposed on the first support bar and second ends disposed on the frame; and

a second support bar disposed on the first support bar, the second support bar being more magnetic than the first support bar.

9. The apparatus of claim 8, wherein:

the substrate is disposed between the mask frame assembly and the electrostatic chuck; and

a first attractive force between the electrostatic chuck and the second support bar is greater than a second attractive force between the electrostatic chuck and the first support bar.

10. The apparatus of claim 9, wherein a strength of the first attractive force weakens from a central portion of the second support bar towards the second ends.

11. The apparatus of claim 8, wherein the first support bar is disposed between the split masks and the second support bar.

12. The apparatus of claim 8, wherein:

a thickness of the first support bar in a third direction perpendicular to the first direction and the second direction is greater than a thickness of the second support bar in the third direction; and

a width of the first support bar in the second direction is greater than a width of the second support bar in the second direction.

13. The apparatus of claim 8, wherein:

the second support bar is one of a plurality of second support bars disposed on the first support bar; and

the plurality of second support bars are spaced apart from one another in the first direction or the second direction.

14. The apparatus of claim 8, wherein:

the first support bar comprises a groove; and

the second support bar is at least partially disposed in the groove.

15. The apparatus of claim 8, wherein at least one dimension of the second support bar decreases with increasing distance from a central portion of the second support bar towards the second ends.

16. The apparatus of claim 10, wherein:

the frame comprises first grooves disposed on second grooves;

the first ends interface with the first grooves; and

the second ends interface with the second grooves.

17. A method of manufacturing a display apparatus, the method comprising:

causing, at least in part, a substrate of the display apparatus to be positioned with respect to a mask frame assembly; and

causing, at least in part, a deposition material to be deposited on the substrate according to deposition patterns of the mask frame assembly,

wherein the mask frame assembly comprises;

a frame comprising an opening;

a first support bar spanning the opening in a first direction, the first support bar comprising first ends disposed on the frame;

split masks spanning the opening in a second direction crossing the first direction, the split masks comprising first portions disposed on the first support bar and second ends disposed on the frame; and

a second support bar disposed on the first support bar, the second support bar being more magnetic than the first support bar,

is wherein the deposition patterns are formed in the split masks.

18. The method of claim 17, wherein:

the substrate is positioned with respect to the mask frame assembly via a chuck; and

a first attractive force between the chuck and the second support bar is greater than a second attractive force between the chuck and the first support bar.

19. The method of claim 18, wherein a strength of the first attractive force weakens from a central portion of the second support bar towards the second ends.

20. The method of claim 17, wherein:

the second support bar is one of a plurality of second support bars disposed on the first support bar; and

the plurality of second support bars are spaced apart from one another in the first direction or the second direction.