BINARY PATTERNING FOR THREE-DIMENSIONAL MEMORY FORMATION
First Claim
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1. A method for designing a patterning process for a three-dimensional (3D) memory, the method comprising:
- defining a target 3D structure of the 3D memory, to be applied in a periodic structure of layers on a substrate;
converting the target 3D structure into a sequence of multiple steps, each step specifying a respective pattern to be removed and a respective number of the layers to be removed from the periodic structure under the respective pattern; and
sending the sequence of steps to one or more manufacturing tools.
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Abstract
A method for designing a patterning process for a three-dimensional (3D) memory includes defining a target 3D structure of the 3D memory, to be applied in a periodic structure of layers on a substrate. The target 3D structure is converted into a sequence of multiple steps, each step specifying a respective pattern to be removed and a respective number of the layers to be removed from the periodic structure under the respective pattern. The sequence of steps is sent to one or more manufacturing tools.
8 Citations
20 Claims
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1. A method for designing a patterning process for a three-dimensional (3D) memory, the method comprising:
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defining a target 3D structure of the 3D memory, to be applied in a periodic structure of layers on a substrate; converting the target 3D structure into a sequence of multiple steps, each step specifying a respective pattern to be removed and a respective number of the layers to be removed from the periodic structure under the respective pattern; and sending the sequence of steps to one or more manufacturing tools. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A system for designing a patterning process for a three-dimensional (3D) memory, the system comprising:
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an interface, which is configured to exchange information with one or more manufacturing tools; and a processor, which is configured to define a target 3D structure of the 3D memory, to be applied in a periodic structure of layers on a substrate, to convert the target 3D structure into a sequence of multiple steps, each step specifying a respective pattern to be removed and a respective number of the layers to be removed from the periodic structure under the respective pattern, and to send, via the interface, the sequence of steps to the one or more manufacturing tools. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18)
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19. A non-transitory computer-readable medium including instructions that, when executed by one or more processors, cause the one or more processors to perform a method for designing a patterning process for a three-dimensional (3D) device, comprising:
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defining a target 3D structure of the 3D device, to be applied in a periodic structure of layers on a substrate; converting the target 3D structure into a sequence of multiple steps, each step specifying a respective pattern to be removed and a respective number of the layers to be removed from the periodic structure under the respective pattern; and sending the sequence of steps to one or more manufacturing tools. - View Dependent Claims (20)
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Specification