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PATTERN DECOMPOSITION FOR DIRECTED SELF ASSEMBLY PATTERNS TEMPLATED BY SIDEWALL IMAGE TRANSFER

  • US 20170162380A1
  • Filed: 01/03/2017
  • Published: 06/08/2017
  • Est. Priority Date: 12/03/2015
  • Status: Active Grant
First Claim
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1. A method of directed self-assembly of a block copolymer material comprising:

  • forming spacers on sidewalls of a plurality of mandrels located on a template layer that is present over a hard mask layer;

    removing the plurality of mandrels, leaving the spacers protruding from a top surface of the template layer;

    removing portions of the template layer that are not cover by the spacers to provide template structures; and

    forming a neutral material layer on exposed portions of the hard mask layer that are not covered by the template structures, wherein the neutral material layer only surrounds a bottom portion of each of the template structures and directly contacts opposite sidewalls of each of the template structures.

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