Si RECESS METHOD IN HKMG REPLACEMENT GATE TECHNOLOGY

• US 20170162590A1
• Filed: 02/22/2017
• Published: 06/08/2017
• Est. Priority Date: 03/14/2014
• Status: Active Grant

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: Wu, Wei Cheng, Chuang, Harry-Hak-Lay, Huang, Chin-Yi, Liu, Shih-Chang, Wu, Chang-Ming
• Granted Patent: US 9,865,610 B2
• Time in Patent Office: Days
• CPC Class Codes: H01L 29/66545 using a dummy, i.e. replacement gate in a process wherein at least a part of the final gate is self aligned to the dummy gate
• CPC Class Codes: H10B 41/30 characterised by the memory core region
• CPC Class Codes: H10B 41/43 comprising only one type of peripheral transistor

Abstract

The present disclosure relates to an integrated circuit (IC). The IC includes a substrate, which includes a periphery region having a first substrate surface and a memory cell region having a second substrate surface. The second substrate surface is recessed within the substrate relative to the first substrate surface. A high k metal gate (HKMG) transistor is disposed on the first substrate surface and includes a HKMG gate. Two neighboring flash memory cells are disposed on the second substrate surface and include a pair of flash memory cell control gates. Top surfaces of the HKMG gate and flash memory cell control gates are co-planar.

Claims

1. An integrated circuit comprising:

a substrate including a periphery region having a first substrate surface and a memory cell region having a second substrate surface, wherein the second substrate surface is recessed within the substrate relative to the first substrate surface;

a high-k metal gate (HKMG) transistor disposed on the first substrate surface and including a gate electrode; and

two neighboring flash memory cells formed on the second substrate surface and including a pair of flash memory cell control gates, wherein a top surface of the gate electrode is co-planar with top surfaces of the pair of flash memory cell control gates.

2. The integrated circuit of claim 1, wherein the substrate further comprises a transition region including a dielectric structure arranged between the peripheral region and the memory cell region.

3. The integrated circuit of claim 2, wherein the first and second substrate surfaces lie on parallel planes and the dielectric structure extends into the substrate along an axis that is perpendicular to the parallel planes, wherein the dielectric structure is asymmetric about the axis.

4. The integrated circuit of claim 1, wherein the two neighboring flash memory cells further comprise:

a pair of control gate structures each comprising a flash memory control gate disposed above a floating gate;

a pair of select gate structure disposed on opposite sides of the pair of control gate structures; and

an erase gate disposed between the pair of control gate structures.

5. The integrated circuit of claim 4, wherein the floating gates, control gates, erase gate and the gate electrode of the HKMG transistor comprise poly silicon.

6. The integrated circuit of claim 1, wherein a distance as measured perpendicularly between a first plane corresponding to the first surface and a second plane corresponding to the second surface ranges from approximately 150 Angstroms to 800 Angstroms.

7. An integrated circuit, comprising:

a substrate including a periphery region having a first substrate surface and a memory cell region having a second substrate surface, wherein the second substrate surface is recessed within the substrate relative to the first substrate surface;

a logic transistor disposed on the first substrate surface and including a logic gate electrode separated from the first surface by a logic gate dielectric; and

a memory cell disposed on the second substrate surface and including a memory gate electrode separated from the second surface by a memory gate dielectric, wherein a top surface of the logic gate electrode is co-planar with a top surface of the memory gate electrode.

8. The integrated circuit of claim 7, wherein the substrate further comprises a transition region including a dielectric structure arranged between the peripheral region and the memory cell region.

9. The integrated circuit of claim 8, wherein the first and second substrate surfaces lie on parallel planes and the dielectric structure extends into the substrate along an axis that is perpendicular to the parallel planes, wherein the dielectric structure is asymmetric about the axis.

10. The integrated circuit of claim 7, wherein the memory cell comprises:

a first individual source/drain region disposed in the memory cell region of the substrate;

a common source/drain region arranged in the memory cell region of the substrate, wherein a first channel region extends between the first individual source/drain region and the common source/drain region; and

wherein the memory gate electrode is arranged over the first channel region.

11. The integrated circuit of claim 10, further comprising:

a second individual source/drain region spaced apart from the first individual source/drain region in the substrate, wherein the common source/drain region is arranged between the first and second individual source/drain regions, and wherein a second channel region extends between the common source/drain region and the second individual source/drain region; and

a second memory gate electrode arranged over the second channel region and having a top surface that is co-planar with the top surfaces of the logic gate electrode and memory gate electrode.

12. The integrated circuit of claim 11, further comprising:

an erase gate over the common source/drain region and arranged between the memory gate electrode and the second memory gate electrode.

13. The integrated circuit of claim 12, wherein the erase gate has a top surface that is co-planar with the top surfaces of the logic gate electrode and memory gate electrode.

14. The integrated circuit of claim 12, wherein the logic gate electrode, memory gate electrode, second memory gate electrode, and erase gate are made of polycrystalline silicon.

15. The integrated circuit of claim 7, wherein a distance as measured perpendicularly between a first plane corresponding to the first surface and a second plane corresponding to the second surface ranges from approximately 150 Angstroms to 800 Angstroms.

16. An integrated circuit, comprising:

a substrate including a first region having a first substrate surface and a second region having a second substrate surface, wherein the second substrate surface is recessed within the substrate relative to the first substrate surface;

a first transistor disposed on the first substrate surface and including a first gate electrode separated from the first surface by a first gate dielectric; and

a second transistor disposed on the second substrate surface and including a second gate electrode separated from the second surface by a second gate dielectric, wherein a top surface of the first gate electrode is co-planar with a top surface of the second gate electrode.

17. The integrated circuit of claim 16, wherein a distance as measured perpendicularly between a first plane corresponding to the first surface and a second plane corresponding to the second surface ranges from approximately 150 Angstroms to 800 Angstroms.

18. The integrated circuit of claim 16, wherein the substrate further comprises a transition region including a dielectric structure arranged between the first region and the second region, wherein the first and second substrate surfaces lie on parallel planes and the dielectric structure extends into the substrate along an axis that is perpendicular to the parallel planes, wherein the dielectric structure is asymmetric about the axis.

19. The integrated circuit of claim 16, wherein the first transistor is included in a memory cell and the second transistor is a high-k metal gate transistor.

20. The integrated circuit of claim 19, wherein the memory cell comprises:

a first individual source/drain region disposed in the first region of the substrate;

a common source/drain region arranged in the first region of the substrate, wherein a first channel region extends between the first individual source/drain region and the common source/drain region; and

wherein the first gate electrode is arranged over the first channel region.