Differential Pressure Sensor
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Accused Products
Abstract
A differential pressure sensor comprises a measuring diaphragm made of an electrically conductive material, two electrically insulating mating bodies, and at least one capacitive transducer. The measuring diaphragm is connected to the mating bodies in a pressure-tight manner with the formation of a measuring chamber in each case along a circumferential edge. The mating bodies each have a diaphragm bed which is concave in the center, wherein the mating bodies each have a pressure channel which extends through the mating body into the measuring chamber. The capacitive transducer has at least one mating body electrode which is formed by a metallic coating of the surface of the mating body in the region of the diaphragm bed and with which contact can be made by a metallic coating of the wall of the pressure channel. The mating body electrode is formed by an inner region of the metallic coating, which inner region is annularly enclosed by an outer region of the coating and is separated from the latter by an annular insulation region.
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Citations
32 Claims
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1-16. -16. (canceled)
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17. A differential pressure sensor, comprising:
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a measuring diaphragm; a first mating body; a second mating body; and at least one capacitive transducer, wherein; said measuring diaphragm comprises an electrically conductive material and is connected to said first mating body and said second mating body in a pressure-tight manner by the formation of a measuring chamber between said first and said second mating bodies, along a circumferential edge; said first mating body and said second mating body comprise an electrically insulating material; the mating bodies each comprise a diaphragm bed which is concave in the center and which can support said measuring diaphragm in case of a unilateral overload; the mating bodies comprise a first and a second pressure channel, which extend from a rear side of the mating bodies facing away from said measuring diaphragm through the mating bodies into the respective measuring chamber; said capacitive transducer comprises at least one mating body electrode, which is formed by a metallic coating on the surface of the mating body facing toward said measuring diaphragm; said mating body electrode can be contacted from the rear side of the mating body by means of a metallic coating of the wall of the pressure chamber; said metallic coating of the surface, which faces the measuring diaphragm, comprises an inner region, which forms the mating body electrode, and an outer region which annularly encloses said inner region and is separated from said inner region by an annular insulation region. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26)
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27. A method for preparing a mating body for a capacitive differential pressure sensor, wherein the mating body comprises:
- an electrically insulating material, such as glass, wherein the mating body comprises a diaphragm bed which is concave in the center and which is lowered with respect to a planar region of the mating body, and wherein a pressure channel extends from a rear side of the mating body through the mating body and ends in the area of the diaphragm bed, the method comprises the following steps;
preparing a first metallic partial coating, which comprises an inner region, an outer region, and a through-connection, wherein the inner region covers a central region of the diaphragm bed, the outer region annularly encloses the inner region and is separated from the inner region by an annular insulation region which runs between the inner region and the outer region, and the through-connection is arranged on one wall of the pressure channel and comprises an electrically conductive connection to the inner region; and preparing a second metallic partial coating, which covers the trough-connection and the inner region and leaves the outer region and the insulation region uncovered. - View Dependent Claims (28, 29, 30, 31, 32)
- an electrically insulating material, such as glass, wherein the mating body comprises a diaphragm bed which is concave in the center and which is lowered with respect to a planar region of the mating body, and wherein a pressure channel extends from a rear side of the mating body through the mating body and ends in the area of the diaphragm bed, the method comprises the following steps;
Specification