ELECTRON MICROSCOPE DEVICE AND IMAGING METHOD USING SAME
First Claim
1. An electron microscope that irradiates a focused electron beam on a sample and acquires an image of the sample, comprising:
- a processing unit which sets processing conditions for acquiring the image of the sample;
an image processing unit which processes the image of the sample being acquired;
an input/output unit which inputs the conditions for acquiring the image of the sample and outputs a result that was processed in the image processing unit; and
a control unit which controls the image processing unit and the input/output unit,wherein the image processing unit comprisesan image region setting unit that sets a wide field region of a relatively wide visual field for acquiring the image of the sample and one or more narrow field regions of a relatively narrow visual field included in the inside of the wide field region, and sets so that dose amounts per pixel of a wide field image and a narrow field image acquired by imaging the wide field image and the narrow field image may become larger in the narrow field image than in the wide field image;
a parameter determining unit that determines a parameter of image quality improvement processing of the wide field region and the narrow field region according to a dose amount per pixel of each region;
an image quality improvement processing unit that performs the image quality improvement processing of the wide field image and the narrow field image based on the parameter determined in the parameter determining unit; and
an image combining unit that combines an image by performing the image quality improvement processing in the image quality improvement processing unit.
2 Assignments
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Accused Products
Abstract
In order to enable high-speed imaging of a wide-field image, the imaging method using the electron microscope comprises: irradiating and scanning a wide-field region of the sample with a low-dose amount of electron beam, and acquiring a wide-field image of the sample; setting, from this wide-field image, a narrow-field region; irradiating and scanning this narrow-field region with a high-dose amount of the electron beam, and acquiring a narrow-field image of the sample; determining the noise-removal parameters for the acquired wide-field image and narrow-field image; performing image quality improvement processing on the wide-field image and the narrow-field image; performing drift correction on the narrow-field image undergone the image quality improvement processing; and combining the narrow-field image undergone this drift correction and the wide-field image in such a manner that the visibility of each is at the same level throughout the entirety of the combined image.
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Citations
16 Claims
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1. An electron microscope that irradiates a focused electron beam on a sample and acquires an image of the sample, comprising:
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a processing unit which sets processing conditions for acquiring the image of the sample; an image processing unit which processes the image of the sample being acquired; an input/output unit which inputs the conditions for acquiring the image of the sample and outputs a result that was processed in the image processing unit; and a control unit which controls the image processing unit and the input/output unit, wherein the image processing unit comprises an image region setting unit that sets a wide field region of a relatively wide visual field for acquiring the image of the sample and one or more narrow field regions of a relatively narrow visual field included in the inside of the wide field region, and sets so that dose amounts per pixel of a wide field image and a narrow field image acquired by imaging the wide field image and the narrow field image may become larger in the narrow field image than in the wide field image; a parameter determining unit that determines a parameter of image quality improvement processing of the wide field region and the narrow field region according to a dose amount per pixel of each region; an image quality improvement processing unit that performs the image quality improvement processing of the wide field image and the narrow field image based on the parameter determined in the parameter determining unit; and an image combining unit that combines an image by performing the image quality improvement processing in the image quality improvement processing unit. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. An imaging method using an electron microscope device that irradiates a focused electron beam on a sample and acquires an image of the sample, comprising the steps of:
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setting initial conditions for acquiring the image of the sample by an input/output unit; setting by a processing unit a wide field region of the sample and one or more narrow field regions that are relatively narrow included in the inside of the wide field region based on the initial conditions set by the input/output unit; setting an image processing unit so that a dose amount per pixel of the wide field image and the narrow field image obtained by imaging, with the electron microscope device, the wide field region and the narrow field region may become larger in the narrow field image than in the wide field region; determining, in the image processing unit, image quality improvement parameters of the images of the wide field region and the narrow field region acquired by the imaging according to the dose amount per pixel of each region; performing image quality improvement processing on the images of the wide field region and the narrow field region using the determined image quality improvement parameters by the image processing unit; and combining, in the image processing unit, the images of the wide field region and the narrow field region on which the image quality improvement processing was performed by the image processing unit. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16)
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Specification