IMAGE SENSOR AND METHOD OF MANUFACTURING THE SAME
First Claim
1. An image sensor comprising:
- a substrate comprising a pixel area, a first side, and a second side opposite to the first side, wherein light is incident to the second side and the pixel area comprises a plurality of pixels;
a pixel separation structure arranged in the substrate to separate the pixels from each other and comprising a conductive layer therein; and
a voltage-applying wire layer spaced apart from the conductive layer and arranged on the substrate to surround at least a portion of an outer portion of the pixel area, wherein the voltage-applying wire layer is electrically connected to the conductive layer through at least one contact.
1 Assignment
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Accused Products
Abstract
An image sensor and a method of manufacturing the image sensor are provided. The image sensor includes: a substrate comprising a pixel area, a first side, and a second side opposite to the first side, wherein the pixel area includes pixels and light is incident to the second side; a photodiode arranged in each of the pixels of the substrate; a pixel separation structure arranged in the substrate to separate the pixels from each other and including a conductive layer therein; and a voltage-applying wire layer spaced apart from the conductive layer and arranged to surround at least a portion of an outer portion of the pixel area. The conductive layer has a mesh structure that is a single unitary structure, and the voltage-applying wire layer is electrically connected to the conductive layer through at least one contact.
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Citations
32 Claims
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1. An image sensor comprising:
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a substrate comprising a pixel area, a first side, and a second side opposite to the first side, wherein light is incident to the second side and the pixel area comprises a plurality of pixels; a pixel separation structure arranged in the substrate to separate the pixels from each other and comprising a conductive layer therein; and a voltage-applying wire layer spaced apart from the conductive layer and arranged on the substrate to surround at least a portion of an outer portion of the pixel area, wherein the voltage-applying wire layer is electrically connected to the conductive layer through at least one contact. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. An image sensor comprising:
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a substrate comprising a pixel area, a dummy area arranged adjacent to the pixel area, a first side, and a second side opposite to the first side, wherein light is incident to the second side, the pixel area comprises a plurality of pixels, and the dummy area comprises at least one dummy pixel; a pixel separation structure arranged in the substrate to separate the pixels from each other and comprising a conductive layer therein; a voltage-applying wire layer arranged at an outer portion of the pixel area and electrically connected to the conductive layer; and an inner wire layer arranged in an insulating layer on the first side, wherein a negative voltage is applied to the conductive layer through the voltage-applying wire layer, and wherein at least one of the voltage-applying wire layer and the inner wire layer is electrically connected to the at least one dummy pixel through a dummy contact. - View Dependent Claims (14, 15, 16, 17)
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18-28. -28. (canceled)
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29. A system comprising:
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a processor; and an image sensor coupled to the processor and under operative control thereof, wherein the image sensor includes; a substrate that includes a pixel area, a first side, and a second side opposite to the first side, wherein light is incident to the second side and the pixel area includes a plurality of pixels; a photodiode arranged in each of the pixels of the substrate; a pixel separation structure arranged in the substrate to separate the pixels from each other and including a conductive layer therein, wherein the conductive layer has a mesh structure; and a voltage-applying wire layer spaced apart from the conductive layer and arranged on the substrate to surround at least a portion of an outer portion of the pixel area, wherein the voltage-applying wire layer is electrically connected to the conductive layer through at least one contact. - View Dependent Claims (30, 31)
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32-39. -39. (canceled)
Specification