GAS DIFFUSER HAVING GROOVED HOLLOW CATHODES
First Claim
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1. A diffuser for a deposition chamber, comprising:
- a plate having edge regions and a center region, and plurality of gas passages comprising an upstream bore and an orifice hole fluidly coupled to the upstream bore that are formed between an upstream side and a downstream side of the plate, and a plurality of grooves surrounding the gas passages, wherein a depth of the grooves varies from the edge regions to the center region of the plate.
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Abstract
In one embodiment, a diffuser for a deposition chamber includes a plate having edge regions and a center region, and plurality of gas passages comprising an upstream bore and an orifice hole fluidly coupled to the upstream bore that are formed between an upstream side and a downstream side of the plate, and a plurality of grooves surrounding the gas passages, wherein a depth of the grooves varies from the edge regions to the center region of the plate.
44 Citations
20 Claims
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1. A diffuser for a deposition chamber, comprising:
a plate having edge regions and a center region, and plurality of gas passages comprising an upstream bore and an orifice hole fluidly coupled to the upstream bore that are formed between an upstream side and a downstream side of the plate, and a plurality of grooves surrounding the gas passages, wherein a depth of the grooves varies from the edge regions to the center region of the plate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A diffuser for a deposition chamber, comprising:
a plate having edge regions and a center region, and plurality of gas passages comprising an upstream bore and an orifice hole fluidly coupled to the upstream bore that are formed between an upstream side and a downstream side of the plate, and a plurality of hollow cathode cavities surrounding the gas passages, wherein each of the hollow cathode cavities comprise a groove and a width of the grooves increases from the center region to the edge regions of the plate. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19)
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20. An electrode for a deposition chamber, comprising:
a plate having edge regions and a center region, and plurality of gas passages comprising an upstream bore and an orifice hole fluidly coupled to the upstream bore that are formed between an upstream side and a downstream side of the plate, and a plurality of hollow cathode cavities formed in a groove pattern on a downstream side of the plate and surrounding the gas passages, wherein the groove pattern comprises a plurality of grooves having a size that varies from the center region to the edge regions of the plate.
Specification